7/19/2011	10:16:44 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/19/2011	10:16:44 AM	Recipe started at 10:16 AM
7/19/2011	10:16:45 AM	Helium valve closed
7/19/2011	10:16:45 AM	H2 valve closed
7/19/2011	10:16:45 AM	BCl3 valve closed
7/19/2011	10:16:45 AM	PH3 valve closed
7/19/2011	10:16:45 AM	SiCl4 pre valve closed
7/19/2011	10:16:45 AM	SiCl4 post valve closed
7/19/2011	10:16:45 AM	Main Vac valve closed
7/19/2011	10:16:45 AM	Bypass valve closed
7/19/2011	10:16:45 AM	Bubbler valve closed
7/19/2011	10:16:45 AM	Helium MFC set to  0.000000
7/19/2011	10:16:45 AM	H2 MFC set to  0.000000
7/19/2011	10:16:45 AM	BCl3 MFC set to  0.000000
7/19/2011	10:16:45 AM	PHl3 MFC set to  0.000000
7/19/2011	10:16:45 AM	SiCl4 MFC set to  0.000000
7/19/2011	10:16:45 AM	Bypass solenoid MFC set to  0.000000
7/19/2011	10:16:45 AM	Tube furnace set to 0
7/19/2011	10:16:48 AM	H2 valve closed
7/19/2011	10:16:48 AM	BCl3 valve closed
7/19/2011	10:16:48 AM	PH3 valve closed
7/19/2011	10:16:48 AM	SiCl4 pre valve closed
7/19/2011	10:16:48 AM	SiCl4 post valve closed
7/19/2011	10:16:48 AM	Main Vac valve closed
7/19/2011	10:16:48 AM	Bypass valve closed
7/19/2011	10:16:48 AM	Bubbler valve closed
7/19/2011	10:16:48 AM	Helium valve opened
7/19/2011	10:16:48 AM	Helium MFC set to  500.000000
7/19/2011	10:16:48 AM	H2 MFC set to  0.000000
7/19/2011	10:16:48 AM	BCl3 MFC set to  0.000000
7/19/2011	10:16:48 AM	PHl3 MFC set to  0.000000
7/19/2011	10:16:48 AM	SiCl4 MFC set to  0.000000
7/19/2011	10:16:48 AM	Bypass solenoid MFC set to  0.000000
7/19/2011	10:16:48 AM	Tube furnace set to 0
7/19/2011	10:17:53 AM	Helium valve closed
7/19/2011	10:17:53 AM	H2 valve closed
7/19/2011	10:17:53 AM	BCl3 valve closed
7/19/2011	10:17:53 AM	PH3 valve closed
7/19/2011	10:17:53 AM	SiCl4 pre valve closed
7/19/2011	10:17:53 AM	SiCl4 post valve closed
7/19/2011	10:17:53 AM	Main Vac valve closed
7/19/2011	10:17:53 AM	Bypass valve closed
7/19/2011	10:17:53 AM	Bubbler valve closed
7/19/2011	10:17:53 AM	Helium MFC set to  0.000000
7/19/2011	10:17:53 AM	H2 MFC set to  0.000000
7/19/2011	10:17:53 AM	BCl3 MFC set to  0.000000
7/19/2011	10:17:53 AM	PHl3 MFC set to  0.000000
7/19/2011	10:17:53 AM	SiCl4 MFC set to  0.000000
7/19/2011	10:17:53 AM	Bypass solenoid MFC set to  0.000000
7/19/2011	10:17:53 AM	Tube furnace set to 0
7/19/2011	10:17:54 AM	Run finished at 10:17 AM
7/19/2011	10:17:54 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/19/2011	10:24:06 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/19/2011	10:24:07 AM	Recipe started at 10:24 AM
7/19/2011	10:24:07 AM	Helium valve closed
7/19/2011	10:24:07 AM	H2 valve closed
7/19/2011	10:24:07 AM	BCl3 valve closed
7/19/2011	10:24:07 AM	PH3 valve closed
7/19/2011	10:24:07 AM	SiCl4 pre valve closed
7/19/2011	10:24:07 AM	SiCl4 post valve closed
7/19/2011	10:24:07 AM	Main Vac valve closed
7/19/2011	10:24:07 AM	Bubbler valve closed
7/19/2011	10:24:07 AM	Bypass valve opened
7/19/2011	10:24:07 AM	Helium MFC set to  0.000000
7/19/2011	10:24:07 AM	H2 MFC set to  0.000000
7/19/2011	10:24:07 AM	BCl3 MFC set to  0.000000
7/19/2011	10:24:07 AM	PHl3 MFC set to  0.000000
7/19/2011	10:24:07 AM	SiCl4 MFC set to  0.000000
7/19/2011	10:24:07 AM	Bypass solenoid MFC set to  0.000000
7/19/2011	10:24:08 AM	Tube furnace set to 0
7/19/2011	10:25:14 AM	Helium valve closed
7/19/2011	10:25:14 AM	H2 valve closed
7/19/2011	10:25:14 AM	BCl3 valve closed
7/19/2011	10:25:14 AM	PH3 valve closed
7/19/2011	10:25:14 AM	SiCl4 pre valve closed
7/19/2011	10:25:14 AM	SiCl4 post valve closed
7/19/2011	10:25:14 AM	Main Vac valve closed
7/19/2011	10:25:14 AM	Bubbler valve closed
7/19/2011	10:25:14 AM	Bypass valve opened
7/19/2011	10:25:14 AM	Helium MFC set to  0.000000
7/19/2011	10:25:14 AM	H2 MFC set to  0.000000
7/19/2011	10:25:14 AM	BCl3 MFC set to  0.000000
7/19/2011	10:25:14 AM	PHl3 MFC set to  0.000000
7/19/2011	10:25:14 AM	SiCl4 MFC set to  0.000000
7/19/2011	10:25:14 AM	Bypass solenoid MFC set to  0.000000
7/19/2011	10:25:14 AM	Tube furnace set to 0
7/19/2011	10:26:14 AM	Helium valve closed
7/19/2011	10:26:14 AM	H2 valve closed
7/19/2011	10:26:14 AM	BCl3 valve closed
7/19/2011	10:26:14 AM	PH3 valve closed
7/19/2011	10:26:14 AM	SiCl4 pre valve closed
7/19/2011	10:26:14 AM	SiCl4 post valve closed
7/19/2011	10:26:14 AM	Bypass valve closed
7/19/2011	10:26:14 AM	Bubbler valve closed
7/19/2011	10:26:14 AM	Main Vac valve opened
7/19/2011	10:26:14 AM	Helium MFC set to  0.000000
7/19/2011	10:26:14 AM	H2 MFC set to  0.000000
7/19/2011	10:26:14 AM	BCl3 MFC set to  0.000000
7/19/2011	10:26:14 AM	PHl3 MFC set to  0.000000
7/19/2011	10:26:14 AM	SiCl4 MFC set to  0.000000
7/19/2011	10:26:14 AM	Bypass solenoid MFC set to  0.000000
7/19/2011	10:26:14 AM	Tube furnace set to 0
7/19/2011	10:26:15 AM	Run finished at 10:26 AM
7/19/2011	10:26:15 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/19/2011	10:56:06 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
7/19/2011	10:56:07 AM	Recipe started at 10:56 AM
7/19/2011	10:56:07 AM	Helium valve closed
7/19/2011	10:56:07 AM	H2 valve closed
7/19/2011	10:56:07 AM	BCl3 valve closed
7/19/2011	10:56:07 AM	PH3 valve closed
7/19/2011	10:56:07 AM	SiCl4 pre valve closed
7/19/2011	10:56:07 AM	SiCl4 post valve closed
7/19/2011	10:56:07 AM	Main Vac valve closed
7/19/2011	10:56:07 AM	Bypass valve closed
7/19/2011	10:56:07 AM	Bubbler valve closed
7/19/2011	10:56:07 AM	Helium MFC set to  0.000000
7/19/2011	10:56:07 AM	H2 MFC set to  0.000000
7/19/2011	10:56:07 AM	BCl3 MFC set to  0.000000
7/19/2011	10:56:07 AM	PHl3 MFC set to  0.000000
7/19/2011	10:56:07 AM	SiCl4 MFC set to  0.000000
7/19/2011	10:56:07 AM	Bypass solenoid MFC set to  0.000000
7/19/2011	10:56:07 AM	Tube furnace set to 0
7/19/2011	10:56:07 AM	Run finished at 10:56 AM
7/19/2011	10:56:07 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
7/19/2011	10:56:38 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/19/2011	10:56:39 AM	Recipe started at 10:56 AM
7/19/2011	10:56:39 AM	Helium valve closed
7/19/2011	10:56:39 AM	H2 valve closed
7/19/2011	10:56:39 AM	BCl3 valve closed
7/19/2011	10:56:39 AM	PH3 valve closed
7/19/2011	10:56:39 AM	SiCl4 pre valve closed
7/19/2011	10:56:39 AM	SiCl4 post valve closed
7/19/2011	10:56:39 AM	Main Vac valve closed
7/19/2011	10:56:39 AM	Bubbler valve closed
7/19/2011	10:56:39 AM	Bypass valve opened
7/19/2011	10:56:39 AM	Helium MFC set to  0.000000
7/19/2011	10:56:39 AM	H2 MFC set to  0.000000
7/19/2011	10:56:39 AM	BCl3 MFC set to  0.000000
7/19/2011	10:56:39 AM	PHl3 MFC set to  0.000000
7/19/2011	10:56:39 AM	SiCl4 MFC set to  0.000000
7/19/2011	10:56:39 AM	Bypass solenoid MFC set to  0.000000
7/19/2011	10:56:39 AM	Tube furnace set to 0
7/19/2011	10:56:40 AM	Helium valve closed
7/19/2011	10:56:40 AM	H2 valve closed
7/19/2011	10:56:40 AM	BCl3 valve closed
7/19/2011	10:56:40 AM	PH3 valve closed
7/19/2011	10:56:40 AM	SiCl4 pre valve closed
7/19/2011	10:56:40 AM	SiCl4 post valve closed
7/19/2011	10:56:40 AM	Main Vac valve closed
7/19/2011	10:56:40 AM	Bubbler valve closed
7/19/2011	10:56:40 AM	Bypass valve opened
7/19/2011	10:56:40 AM	Helium MFC set to  0.000000
7/19/2011	10:56:40 AM	H2 MFC set to  0.000000
7/19/2011	10:56:40 AM	BCl3 MFC set to  0.000000
7/19/2011	10:56:40 AM	PHl3 MFC set to  0.000000
7/19/2011	10:56:40 AM	SiCl4 MFC set to  0.000000
7/19/2011	10:56:40 AM	Bypass solenoid MFC set to  0.000000
7/19/2011	10:56:40 AM	Tube furnace set to 0
7/19/2011	10:56:56 AM	Helium valve closed
7/19/2011	10:56:56 AM	H2 valve closed
7/19/2011	10:56:56 AM	BCl3 valve closed
7/19/2011	10:56:56 AM	PH3 valve closed
7/19/2011	10:56:56 AM	SiCl4 pre valve closed
7/19/2011	10:56:56 AM	SiCl4 post valve closed
7/19/2011	10:56:56 AM	Bypass valve closed
7/19/2011	10:56:56 AM	Bubbler valve closed
7/19/2011	10:56:56 AM	Main Vac valve opened
7/19/2011	10:56:56 AM	Helium MFC set to  0.000000
7/19/2011	10:56:56 AM	H2 MFC set to  0.000000
7/19/2011	10:56:56 AM	BCl3 MFC set to  0.000000
7/19/2011	10:56:56 AM	PHl3 MFC set to  0.000000
7/19/2011	10:56:56 AM	SiCl4 MFC set to  0.000000
7/19/2011	10:56:56 AM	Bypass solenoid MFC set to  0.000000
7/19/2011	10:56:56 AM	Tube furnace set to 0
7/19/2011	10:56:57 AM	Run finished at 10:56 AM
7/19/2011	10:56:57 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/19/2011	10:57:16 AM	Main Vac valve closed
7/19/2011	10:57:20 AM	Main Vac valve opened
7/19/2011	11:02:46 AM	Helium MFC set to  20.000000
7/19/2011	11:02:48 AM	Helium valve opened
7/19/2011	11:06:16 AM	Helium valve closed
7/19/2011	11:06:20 AM	Helium MFC set to  0.000000
7/19/2011	11:12:23 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
7/19/2011	11:12:24 AM	Recipe started at 11:12 AM
7/19/2011	11:12:24 AM	Helium valve closed
7/19/2011	11:12:24 AM	H2 valve closed
7/19/2011	11:12:24 AM	BCl3 valve closed
7/19/2011	11:12:24 AM	PH3 valve closed
7/19/2011	11:12:24 AM	SiCl4 pre valve closed
7/19/2011	11:12:24 AM	SiCl4 post valve closed
7/19/2011	11:12:24 AM	Main Vac valve closed
7/19/2011	11:12:24 AM	Bypass valve closed
7/19/2011	11:12:24 AM	Bubbler valve closed
7/19/2011	11:12:24 AM	Helium MFC set to  0.000000
7/19/2011	11:12:24 AM	H2 MFC set to  0.000000
7/19/2011	11:12:24 AM	BCl3 MFC set to  0.000000
7/19/2011	11:12:24 AM	PHl3 MFC set to  0.000000
7/19/2011	11:12:24 AM	SiCl4 MFC set to  0.000000
7/19/2011	11:12:24 AM	Bypass solenoid MFC set to  0.000000
7/19/2011	11:12:24 AM	Tube furnace set to 0
7/19/2011	11:12:24 AM	Run finished at 11:12 AM
7/19/2011	11:12:24 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
7/19/2011	11:12:44 AM	Recipe started at 11:12 AM
7/19/2011	11:12:44 AM	Helium valve closed
7/19/2011	11:12:44 AM	H2 valve closed
7/19/2011	11:12:44 AM	BCl3 valve closed
7/19/2011	11:12:44 AM	PH3 valve closed
7/19/2011	11:12:44 AM	SiCl4 pre valve closed
7/19/2011	11:12:44 AM	SiCl4 post valve closed
7/19/2011	11:12:44 AM	Main Vac valve closed
7/19/2011	11:12:44 AM	Bypass valve closed
7/19/2011	11:12:44 AM	Bubbler valve closed
7/19/2011	11:12:44 AM	Helium MFC set to  0.000000
7/19/2011	11:12:44 AM	H2 MFC set to  0.000000
7/19/2011	11:12:44 AM	BCl3 MFC set to  0.000000
7/19/2011	11:12:44 AM	PHl3 MFC set to  0.000000
7/19/2011	11:12:44 AM	SiCl4 MFC set to  0.000000
7/19/2011	11:12:44 AM	Bypass solenoid MFC set to  0.000000
7/19/2011	11:12:44 AM	Tube furnace set to 0
7/19/2011	11:12:47 AM	Helium valve closed
7/19/2011	11:12:47 AM	BCl3 valve closed
7/19/2011	11:12:47 AM	PH3 valve closed
7/19/2011	11:12:47 AM	SiCl4 pre valve closed
7/19/2011	11:12:47 AM	SiCl4 post valve closed
7/19/2011	11:12:47 AM	Main Vac valve closed
7/19/2011	11:12:47 AM	Bypass valve closed
7/19/2011	11:12:47 AM	Bubbler valve closed
7/19/2011	11:12:47 AM	H2 valve opened
7/19/2011	11:12:47 AM	Helium MFC set to  0.000000
7/19/2011	11:12:47 AM	H2 MFC set to  500.000000
7/19/2011	11:12:47 AM	BCl3 MFC set to  0.000000
7/19/2011	11:12:47 AM	PHl3 MFC set to  0.000000
7/19/2011	11:12:47 AM	SiCl4 MFC set to  0.000000
7/19/2011	11:12:47 AM	Bypass solenoid MFC set to  0.000000
7/19/2011	11:12:47 AM	Tube furnace set to 0
7/19/2011	11:13:54 AM	Helium valve closed
7/19/2011	11:13:54 AM	BCl3 valve closed
7/19/2011	11:13:54 AM	PH3 valve closed
7/19/2011	11:13:54 AM	SiCl4 pre valve closed
7/19/2011	11:13:54 AM	SiCl4 post valve closed
7/19/2011	11:13:54 AM	Main Vac valve closed
7/19/2011	11:13:54 AM	Bypass valve closed
7/19/2011	11:13:54 AM	H2 valve opened
7/19/2011	11:13:54 AM	Bubbler valve opened
7/19/2011	11:13:54 AM	Helium MFC set to  0.000000
7/19/2011	11:13:54 AM	H2 MFC set to  500.000000
7/19/2011	11:13:54 AM	BCl3 MFC set to  0.000000
7/19/2011	11:13:54 AM	PHl3 MFC set to  0.000000
7/19/2011	11:13:54 AM	SiCl4 MFC set to  0.000000
7/19/2011	11:13:54 AM	Bypass solenoid MFC set to  0.000000
7/19/2011	11:13:54 AM	Tube furnace set to 0
7/19/2011	11:13:55 AM	Helium valve closed
7/19/2011	11:13:55 AM	BCl3 valve closed
7/19/2011	11:13:55 AM	PH3 valve closed
7/19/2011	11:13:55 AM	SiCl4 pre valve closed
7/19/2011	11:13:55 AM	SiCl4 post valve closed
7/19/2011	11:13:55 AM	Main Vac valve closed
7/19/2011	11:13:55 AM	Bypass valve closed
7/19/2011	11:13:55 AM	H2 valve opened
7/19/2011	11:13:55 AM	Bubbler valve opened
7/19/2011	11:13:55 AM	Helium MFC set to  0.000000
7/19/2011	11:13:55 AM	H2 MFC set to  500.000000
7/19/2011	11:13:55 AM	BCl3 MFC set to  0.000000
7/19/2011	11:13:55 AM	PHl3 MFC set to  0.000000
7/19/2011	11:13:55 AM	SiCl4 MFC set to  0.000000
7/19/2011	11:13:55 AM	Bypass solenoid MFC set to  0.000000
7/19/2011	11:13:55 AM	Tube furnace set to 1000
7/19/2011	11:33:55 AM	Helium valve closed
7/19/2011	11:33:55 AM	PH3 valve closed
7/19/2011	11:33:55 AM	Main Vac valve closed
7/19/2011	11:33:55 AM	Bypass valve closed
7/19/2011	11:33:55 AM	H2 valve opened
7/19/2011	11:33:55 AM	BCl3 valve opened
7/19/2011	11:33:55 AM	SiCl4 pre valve opened
7/19/2011	11:33:55 AM	SiCl4 post valve opened
7/19/2011	11:33:55 AM	Bubbler valve opened
7/19/2011	11:33:55 AM	Helium MFC set to  0.000000
7/19/2011	11:33:55 AM	H2 MFC set to  500.000000
7/19/2011	11:33:55 AM	BCl3 MFC set to  8.000000
7/19/2011	11:33:55 AM	PHl3 MFC set to  0.000000
7/19/2011	11:33:55 AM	SiCl4 MFC set to  50.000000
7/19/2011	11:33:55 AM	Bypass solenoid MFC set to  0.000000
7/19/2011	11:33:55 AM	Tube furnace set to 1000
7/19/2011	11:50:55 AM	Helium valve closed
7/19/2011	11:50:55 AM	BCl3 valve closed
7/19/2011	11:50:55 AM	PH3 valve closed
7/19/2011	11:50:55 AM	SiCl4 pre valve closed
7/19/2011	11:50:55 AM	SiCl4 post valve closed
7/19/2011	11:50:55 AM	Main Vac valve closed
7/19/2011	11:50:55 AM	Bypass valve closed
7/19/2011	11:50:55 AM	H2 valve opened
7/19/2011	11:50:55 AM	Bubbler valve opened
7/19/2011	11:50:55 AM	Helium MFC set to  0.000000
7/19/2011	11:50:55 AM	H2 MFC set to  500.000000
7/19/2011	11:50:55 AM	BCl3 MFC set to  0.000000
7/19/2011	11:50:55 AM	PHl3 MFC set to  0.000000
7/19/2011	11:50:55 AM	SiCl4 MFC set to  0.000000
7/19/2011	11:50:55 AM	Bypass solenoid MFC set to  0.000000
7/19/2011	11:50:55 AM	Tube furnace set to 750
7/19/2011	11:55:55 AM	H2 valve closed
7/19/2011	11:55:55 AM	BCl3 valve closed
7/19/2011	11:55:55 AM	PH3 valve closed
7/19/2011	11:55:55 AM	SiCl4 pre valve closed
7/19/2011	11:55:55 AM	SiCl4 post valve closed
7/19/2011	11:55:55 AM	Main Vac valve closed
7/19/2011	11:55:55 AM	Bypass valve closed
7/19/2011	11:55:55 AM	Helium valve opened
7/19/2011	11:55:55 AM	Bubbler valve opened
7/19/2011	11:55:55 AM	Helium MFC set to  500.000000
7/19/2011	11:55:55 AM	H2 MFC set to  0.000000
7/19/2011	11:55:55 AM	BCl3 MFC set to  0.000000
7/19/2011	11:55:55 AM	PHl3 MFC set to  0.000000
7/19/2011	11:55:55 AM	SiCl4 MFC set to  0.000000
7/19/2011	11:55:55 AM	Bypass solenoid MFC set to  0.000000
7/19/2011	11:55:56 AM	Tube furnace set to 0
7/19/2011	12:15:56 PM	Helium valve closed
7/19/2011	12:15:56 PM	H2 valve closed
7/19/2011	12:15:56 PM	BCl3 valve closed
7/19/2011	12:15:56 PM	PH3 valve closed
7/19/2011	12:15:56 PM	SiCl4 pre valve closed
7/19/2011	12:15:56 PM	SiCl4 post valve closed
7/19/2011	12:15:56 PM	Main Vac valve closed
7/19/2011	12:15:56 PM	Bypass valve closed
7/19/2011	12:15:56 PM	Bubbler valve closed
7/19/2011	12:15:56 PM	Helium MFC set to  0.000000
7/19/2011	12:15:56 PM	H2 MFC set to  0.000000
7/19/2011	12:15:56 PM	BCl3 MFC set to  0.000000
7/19/2011	12:15:56 PM	PHl3 MFC set to  0.000000
7/19/2011	12:15:56 PM	SiCl4 MFC set to  0.000000
7/19/2011	12:15:56 PM	Bypass solenoid MFC set to  0.000000
7/19/2011	12:15:56 PM	Tube furnace set to 0
7/19/2011	12:15:57 PM	Run finished at 12:15 PM
7/19/2011	12:48:23 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/19/2011	12:48:24 PM	Recipe started at 12:48 PM
7/19/2011	12:48:24 PM	Helium valve closed
7/19/2011	12:48:24 PM	H2 valve closed
7/19/2011	12:48:24 PM	BCl3 valve closed
7/19/2011	12:48:24 PM	PH3 valve closed
7/19/2011	12:48:24 PM	SiCl4 pre valve closed
7/19/2011	12:48:24 PM	SiCl4 post valve closed
7/19/2011	12:48:24 PM	Main Vac valve closed
7/19/2011	12:48:24 PM	Bypass valve closed
7/19/2011	12:48:24 PM	Bubbler valve closed
7/19/2011	12:48:24 PM	Helium MFC set to  0.000000
7/19/2011	12:48:24 PM	H2 MFC set to  0.000000
7/19/2011	12:48:24 PM	BCl3 MFC set to  0.000000
7/19/2011	12:48:24 PM	PHl3 MFC set to  0.000000
7/19/2011	12:48:24 PM	SiCl4 MFC set to  0.000000
7/19/2011	12:48:24 PM	Bypass solenoid MFC set to  0.000000
7/19/2011	12:48:24 PM	Tube furnace set to 0
7/19/2011	12:48:27 PM	H2 valve closed
7/19/2011	12:48:27 PM	BCl3 valve closed
7/19/2011	12:48:27 PM	PH3 valve closed
7/19/2011	12:48:27 PM	SiCl4 pre valve closed
7/19/2011	12:48:27 PM	SiCl4 post valve closed
7/19/2011	12:48:27 PM	Main Vac valve closed
7/19/2011	12:48:27 PM	Bypass valve closed
7/19/2011	12:48:27 PM	Bubbler valve closed
7/19/2011	12:48:27 PM	Helium valve opened
7/19/2011	12:48:27 PM	Helium MFC set to  500.000000
7/19/2011	12:48:27 PM	H2 MFC set to  0.000000
7/19/2011	12:48:27 PM	BCl3 MFC set to  0.000000
7/19/2011	12:48:27 PM	PHl3 MFC set to  0.000000
7/19/2011	12:48:27 PM	SiCl4 MFC set to  0.000000
7/19/2011	12:48:27 PM	Bypass solenoid MFC set to  0.000000
7/19/2011	12:48:27 PM	Tube furnace set to 0
7/19/2011	12:48:34 PM	Helium valve closed
7/19/2011	12:48:34 PM	H2 valve closed
7/19/2011	12:48:34 PM	BCl3 valve closed
7/19/2011	12:48:34 PM	PH3 valve closed
7/19/2011	12:48:34 PM	SiCl4 pre valve closed
7/19/2011	12:48:34 PM	SiCl4 post valve closed
7/19/2011	12:48:34 PM	Main Vac valve closed
7/19/2011	12:48:34 PM	Bypass valve closed
7/19/2011	12:48:34 PM	Bubbler valve closed
7/19/2011	12:48:34 PM	Helium MFC set to  0.000000
7/19/2011	12:48:34 PM	H2 MFC set to  0.000000
7/19/2011	12:48:34 PM	BCl3 MFC set to  0.000000
7/19/2011	12:48:34 PM	PHl3 MFC set to  0.000000
7/19/2011	12:48:34 PM	SiCl4 MFC set to  0.000000
7/19/2011	12:48:34 PM	Bypass solenoid MFC set to  0.000000
7/19/2011	12:48:34 PM	Tube furnace set to 0
7/19/2011	12:48:35 PM	Run finished at 12:48 PM
7/19/2011	12:48:35 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/19/2011	1:06:02 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/19/2011	1:06:02 PM	Recipe started at 1:06 PM
7/19/2011	1:06:03 PM	Helium valve closed
7/19/2011	1:06:03 PM	H2 valve closed
7/19/2011	1:06:03 PM	BCl3 valve closed
7/19/2011	1:06:03 PM	PH3 valve closed
7/19/2011	1:06:03 PM	SiCl4 pre valve closed
7/19/2011	1:06:03 PM	SiCl4 post valve closed
7/19/2011	1:06:03 PM	Main Vac valve closed
7/19/2011	1:06:03 PM	Bypass valve closed
7/19/2011	1:06:03 PM	Bubbler valve closed
7/19/2011	1:06:03 PM	Helium MFC set to  0.000000
7/19/2011	1:06:03 PM	H2 MFC set to  0.000000
7/19/2011	1:06:03 PM	BCl3 MFC set to  0.000000
7/19/2011	1:06:03 PM	PHl3 MFC set to  0.000000
7/19/2011	1:06:03 PM	SiCl4 MFC set to  0.000000
7/19/2011	1:06:03 PM	Bypass solenoid MFC set to  0.000000
7/19/2011	1:06:03 PM	Tube furnace set to 0
7/19/2011	1:06:06 PM	H2 valve closed
7/19/2011	1:06:06 PM	BCl3 valve closed
7/19/2011	1:06:06 PM	PH3 valve closed
7/19/2011	1:06:06 PM	SiCl4 pre valve closed
7/19/2011	1:06:06 PM	SiCl4 post valve closed
7/19/2011	1:06:06 PM	Main Vac valve closed
7/19/2011	1:06:06 PM	Bypass valve closed
7/19/2011	1:06:06 PM	Bubbler valve closed
7/19/2011	1:06:06 PM	Helium valve opened
7/19/2011	1:06:06 PM	Helium MFC set to  500.000000
7/19/2011	1:06:06 PM	H2 MFC set to  0.000000
7/19/2011	1:06:06 PM	BCl3 MFC set to  0.000000
7/19/2011	1:06:06 PM	PHl3 MFC set to  0.000000
7/19/2011	1:06:06 PM	SiCl4 MFC set to  0.000000
7/19/2011	1:06:06 PM	Bypass solenoid MFC set to  0.000000
7/19/2011	1:06:06 PM	Tube furnace set to 0
7/19/2011	1:06:07 PM	Helium valve closed
7/19/2011	1:06:07 PM	H2 valve closed
7/19/2011	1:06:07 PM	BCl3 valve closed
7/19/2011	1:06:07 PM	PH3 valve closed
7/19/2011	1:06:07 PM	SiCl4 pre valve closed
7/19/2011	1:06:07 PM	SiCl4 post valve closed
7/19/2011	1:06:07 PM	Main Vac valve closed
7/19/2011	1:06:07 PM	Bypass valve closed
7/19/2011	1:06:07 PM	Bubbler valve closed
7/19/2011	1:06:07 PM	Helium MFC set to  0.000000
7/19/2011	1:06:07 PM	H2 MFC set to  0.000000
7/19/2011	1:06:07 PM	BCl3 MFC set to  0.000000
7/19/2011	1:06:07 PM	PHl3 MFC set to  0.000000
7/19/2011	1:06:07 PM	SiCl4 MFC set to  0.000000
7/19/2011	1:06:07 PM	Bypass solenoid MFC set to  0.000000
7/19/2011	1:06:08 PM	Tube furnace set to 0
7/19/2011	1:06:09 PM	Run finished at 1:06 PM
7/19/2011	1:06:09 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/19/2011	1:10:19 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/19/2011	1:10:20 PM	Recipe started at 1:10 PM
7/19/2011	1:10:20 PM	Helium valve closed
7/19/2011	1:10:20 PM	H2 valve closed
7/19/2011	1:10:20 PM	BCl3 valve closed
7/19/2011	1:10:20 PM	PH3 valve closed
7/19/2011	1:10:20 PM	SiCl4 pre valve closed
7/19/2011	1:10:20 PM	SiCl4 post valve closed
7/19/2011	1:10:20 PM	Main Vac valve closed
7/19/2011	1:10:20 PM	Bubbler valve closed
7/19/2011	1:10:20 PM	Bypass valve opened
7/19/2011	1:10:20 PM	Helium MFC set to  0.000000
7/19/2011	1:10:20 PM	H2 MFC set to  0.000000
7/19/2011	1:10:20 PM	BCl3 MFC set to  0.000000
7/19/2011	1:10:20 PM	PHl3 MFC set to  0.000000
7/19/2011	1:10:20 PM	SiCl4 MFC set to  0.000000
7/19/2011	1:10:20 PM	Bypass solenoid MFC set to  0.000000
7/19/2011	1:10:20 PM	Tube furnace set to 0
7/19/2011	1:11:24 PM	Helium valve closed
7/19/2011	1:11:24 PM	H2 valve closed
7/19/2011	1:11:24 PM	BCl3 valve closed
7/19/2011	1:11:24 PM	PH3 valve closed
7/19/2011	1:11:24 PM	SiCl4 pre valve closed
7/19/2011	1:11:24 PM	SiCl4 post valve closed
7/19/2011	1:11:24 PM	Main Vac valve closed
7/19/2011	1:11:24 PM	Bubbler valve closed
7/19/2011	1:11:24 PM	Bypass valve opened
7/19/2011	1:11:24 PM	Helium MFC set to  0.000000
7/19/2011	1:11:24 PM	H2 MFC set to  0.000000
7/19/2011	1:11:24 PM	BCl3 MFC set to  0.000000
7/19/2011	1:11:24 PM	PHl3 MFC set to  0.000000
7/19/2011	1:11:24 PM	SiCl4 MFC set to  0.000000
7/19/2011	1:11:24 PM	Bypass solenoid MFC set to  0.000000
7/19/2011	1:11:24 PM	Tube furnace set to 0
7/19/2011	1:12:24 PM	Helium valve closed
7/19/2011	1:12:24 PM	H2 valve closed
7/19/2011	1:12:24 PM	BCl3 valve closed
7/19/2011	1:12:24 PM	PH3 valve closed
7/19/2011	1:12:24 PM	SiCl4 pre valve closed
7/19/2011	1:12:24 PM	SiCl4 post valve closed
7/19/2011	1:12:24 PM	Bypass valve closed
7/19/2011	1:12:24 PM	Bubbler valve closed
7/19/2011	1:12:24 PM	Main Vac valve opened
7/19/2011	1:12:24 PM	Helium MFC set to  0.000000
7/19/2011	1:12:24 PM	H2 MFC set to  0.000000
7/19/2011	1:12:24 PM	BCl3 MFC set to  0.000000
7/19/2011	1:12:24 PM	PHl3 MFC set to  0.000000
7/19/2011	1:12:24 PM	SiCl4 MFC set to  0.000000
7/19/2011	1:12:24 PM	Bypass solenoid MFC set to  0.000000
7/19/2011	1:12:24 PM	Tube furnace set to 0
7/19/2011	1:12:25 PM	Run finished at 1:12 PM
7/19/2011	1:12:25 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/19/2011	1:50:57 PM	Helium MFC set to  20.000000
7/19/2011	1:50:59 PM	Helium valve opened
7/19/2011	1:55:00 PM	Helium valve closed
7/19/2011	1:55:05 PM	Helium MFC set to  0.000000
7/19/2011	2:09:32 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
7/19/2011	2:09:32 PM	Recipe started at 2:09 PM
7/19/2011	2:09:32 PM	Helium valve closed
7/19/2011	2:09:32 PM	H2 valve closed
7/19/2011	2:09:32 PM	BCl3 valve closed
7/19/2011	2:09:32 PM	PH3 valve closed
7/19/2011	2:09:32 PM	SiCl4 pre valve closed
7/19/2011	2:09:32 PM	SiCl4 post valve closed
7/19/2011	2:09:32 PM	Main Vac valve closed
7/19/2011	2:09:32 PM	Bypass valve closed
7/19/2011	2:09:32 PM	Bubbler valve closed
7/19/2011	2:09:32 PM	Helium MFC set to  0.000000
7/19/2011	2:09:32 PM	H2 MFC set to  0.000000
7/19/2011	2:09:32 PM	BCl3 MFC set to  0.000000
7/19/2011	2:09:32 PM	PHl3 MFC set to  0.000000
7/19/2011	2:09:32 PM	SiCl4 MFC set to  0.000000
7/19/2011	2:09:32 PM	Bypass solenoid MFC set to  0.000000
7/19/2011	2:09:32 PM	Tube furnace set to 0
7/19/2011	2:09:32 PM	Run finished at 2:09 PM
7/19/2011	2:09:32 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
7/19/2011	2:09:51 PM	Main Vac valve opened
7/19/2011	2:10:19 PM	Recipe started at 2:10 PM
7/19/2011	2:10:19 PM	Helium valve closed
7/19/2011	2:10:19 PM	H2 valve closed
7/19/2011	2:10:19 PM	BCl3 valve closed
7/19/2011	2:10:19 PM	PH3 valve closed
7/19/2011	2:10:19 PM	SiCl4 pre valve closed
7/19/2011	2:10:19 PM	SiCl4 post valve closed
7/19/2011	2:10:19 PM	Main Vac valve closed
7/19/2011	2:10:19 PM	Bypass valve closed
7/19/2011	2:10:19 PM	Bubbler valve closed
7/19/2011	2:10:19 PM	Helium MFC set to  0.000000
7/19/2011	2:10:19 PM	H2 MFC set to  0.000000
7/19/2011	2:10:19 PM	BCl3 MFC set to  0.000000
7/19/2011	2:10:19 PM	PHl3 MFC set to  0.000000
7/19/2011	2:10:19 PM	SiCl4 MFC set to  0.000000
7/19/2011	2:10:19 PM	Bypass solenoid MFC set to  0.000000
7/19/2011	2:10:19 PM	Tube furnace set to 0
7/19/2011	2:10:22 PM	Helium valve closed
7/19/2011	2:10:22 PM	BCl3 valve closed
7/19/2011	2:10:22 PM	PH3 valve closed
7/19/2011	2:10:22 PM	SiCl4 pre valve closed
7/19/2011	2:10:22 PM	SiCl4 post valve closed
7/19/2011	2:10:22 PM	Main Vac valve closed
7/19/2011	2:10:22 PM	Bypass valve closed
7/19/2011	2:10:22 PM	Bubbler valve closed
7/19/2011	2:10:22 PM	H2 valve opened
7/19/2011	2:10:22 PM	Helium MFC set to  0.000000
7/19/2011	2:10:22 PM	H2 MFC set to  500.000000
7/19/2011	2:10:22 PM	BCl3 MFC set to  0.000000
7/19/2011	2:10:22 PM	PHl3 MFC set to  0.000000
7/19/2011	2:10:22 PM	SiCl4 MFC set to  0.000000
7/19/2011	2:10:22 PM	Bypass solenoid MFC set to  0.000000
7/19/2011	2:10:22 PM	Tube furnace set to 0
7/19/2011	2:11:28 PM	Helium valve closed
7/19/2011	2:11:28 PM	BCl3 valve closed
7/19/2011	2:11:28 PM	PH3 valve closed
7/19/2011	2:11:28 PM	SiCl4 pre valve closed
7/19/2011	2:11:28 PM	SiCl4 post valve closed
7/19/2011	2:11:28 PM	Main Vac valve closed
7/19/2011	2:11:28 PM	Bypass valve closed
7/19/2011	2:11:28 PM	H2 valve opened
7/19/2011	2:11:28 PM	Bubbler valve opened
7/19/2011	2:11:28 PM	Helium MFC set to  0.000000
7/19/2011	2:11:28 PM	H2 MFC set to  500.000000
7/19/2011	2:11:28 PM	BCl3 MFC set to  0.000000
7/19/2011	2:11:28 PM	PHl3 MFC set to  0.000000
7/19/2011	2:11:28 PM	SiCl4 MFC set to  0.000000
7/19/2011	2:11:28 PM	Bypass solenoid MFC set to  0.000000
7/19/2011	2:11:28 PM	Tube furnace set to 0
7/19/2011	2:11:29 PM	Helium valve closed
7/19/2011	2:11:29 PM	BCl3 valve closed
7/19/2011	2:11:29 PM	PH3 valve closed
7/19/2011	2:11:29 PM	SiCl4 pre valve closed
7/19/2011	2:11:29 PM	SiCl4 post valve closed
7/19/2011	2:11:29 PM	Main Vac valve closed
7/19/2011	2:11:29 PM	Bypass valve closed
7/19/2011	2:11:29 PM	H2 valve opened
7/19/2011	2:11:29 PM	Bubbler valve opened
7/19/2011	2:11:29 PM	Helium MFC set to  0.000000
7/19/2011	2:11:29 PM	H2 MFC set to  500.000000
7/19/2011	2:11:29 PM	BCl3 MFC set to  0.000000
7/19/2011	2:11:29 PM	PHl3 MFC set to  0.000000
7/19/2011	2:11:29 PM	SiCl4 MFC set to  0.000000
7/19/2011	2:11:29 PM	Bypass solenoid MFC set to  0.000000
7/19/2011	2:11:29 PM	Tube furnace set to 1000
7/19/2011	2:31:29 PM	Helium valve closed
7/19/2011	2:31:29 PM	PH3 valve closed
7/19/2011	2:31:29 PM	Main Vac valve closed
7/19/2011	2:31:29 PM	Bypass valve closed
7/19/2011	2:31:29 PM	H2 valve opened
7/19/2011	2:31:29 PM	BCl3 valve opened
7/19/2011	2:31:29 PM	SiCl4 pre valve opened
7/19/2011	2:31:29 PM	SiCl4 post valve opened
7/19/2011	2:31:29 PM	Bubbler valve opened
7/19/2011	2:31:29 PM	Helium MFC set to  0.000000
7/19/2011	2:31:29 PM	H2 MFC set to  500.000000
7/19/2011	2:31:29 PM	BCl3 MFC set to  8.000000
7/19/2011	2:31:29 PM	PHl3 MFC set to  0.000000
7/19/2011	2:31:29 PM	SiCl4 MFC set to  50.000000
7/19/2011	2:31:29 PM	Bypass solenoid MFC set to  0.000000
7/19/2011	2:31:29 PM	Tube furnace set to 1000
7/19/2011	2:48:29 PM	Helium valve closed
7/19/2011	2:48:29 PM	BCl3 valve closed
7/19/2011	2:48:29 PM	PH3 valve closed
7/19/2011	2:48:29 PM	SiCl4 pre valve closed
7/19/2011	2:48:29 PM	SiCl4 post valve closed
7/19/2011	2:48:29 PM	Main Vac valve closed
7/19/2011	2:48:29 PM	Bypass valve closed
7/19/2011	2:48:29 PM	H2 valve opened
7/19/2011	2:48:29 PM	Bubbler valve opened
7/19/2011	2:48:29 PM	Helium MFC set to  0.000000
7/19/2011	2:48:29 PM	H2 MFC set to  500.000000
7/19/2011	2:48:29 PM	BCl3 MFC set to  0.000000
7/19/2011	2:48:29 PM	PHl3 MFC set to  0.000000
7/19/2011	2:48:29 PM	SiCl4 MFC set to  0.000000
7/19/2011	2:48:29 PM	Bypass solenoid MFC set to  0.000000
7/19/2011	2:48:30 PM	Tube furnace set to 750
7/19/2011	2:53:30 PM	H2 valve closed
7/19/2011	2:53:30 PM	BCl3 valve closed
7/19/2011	2:53:30 PM	PH3 valve closed
7/19/2011	2:53:30 PM	SiCl4 pre valve closed
7/19/2011	2:53:30 PM	SiCl4 post valve closed
7/19/2011	2:53:30 PM	Main Vac valve closed
7/19/2011	2:53:30 PM	Bypass valve closed
7/19/2011	2:53:30 PM	Helium valve opened
7/19/2011	2:53:30 PM	Bubbler valve opened
7/19/2011	2:53:30 PM	Helium MFC set to  500.000000
7/19/2011	2:53:30 PM	H2 MFC set to  0.000000
7/19/2011	2:53:30 PM	BCl3 MFC set to  0.000000
7/19/2011	2:53:30 PM	PHl3 MFC set to  0.000000
7/19/2011	2:53:30 PM	SiCl4 MFC set to  0.000000
7/19/2011	2:53:30 PM	Bypass solenoid MFC set to  0.000000
7/19/2011	2:53:30 PM	Tube furnace set to 0
7/19/2011	3:13:30 PM	Helium valve closed
7/19/2011	3:13:30 PM	H2 valve closed
7/19/2011	3:13:30 PM	BCl3 valve closed
7/19/2011	3:13:30 PM	PH3 valve closed
7/19/2011	3:13:30 PM	SiCl4 pre valve closed
7/19/2011	3:13:30 PM	SiCl4 post valve closed
7/19/2011	3:13:30 PM	Main Vac valve closed
7/19/2011	3:13:30 PM	Bypass valve closed
7/19/2011	3:13:30 PM	Bubbler valve closed
7/19/2011	3:13:30 PM	Helium MFC set to  0.000000
7/19/2011	3:13:30 PM	H2 MFC set to  0.000000
7/19/2011	3:13:30 PM	BCl3 MFC set to  0.000000
7/19/2011	3:13:30 PM	PHl3 MFC set to  0.000000
7/19/2011	3:13:30 PM	SiCl4 MFC set to  0.000000
7/19/2011	3:13:30 PM	Bypass solenoid MFC set to  0.000000
7/19/2011	3:13:30 PM	Tube furnace set to 0
7/19/2011	3:13:31 PM	Run finished at 3:13 PM
7/19/2011	3:33:46 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/19/2011	3:33:46 PM	Recipe started at 3:33 PM
7/19/2011	3:33:46 PM	Helium valve closed
7/19/2011	3:33:46 PM	H2 valve closed
7/19/2011	3:33:46 PM	BCl3 valve closed
7/19/2011	3:33:46 PM	PH3 valve closed
7/19/2011	3:33:46 PM	SiCl4 pre valve closed
7/19/2011	3:33:46 PM	SiCl4 post valve closed
7/19/2011	3:33:46 PM	Main Vac valve closed
7/19/2011	3:33:46 PM	Bypass valve closed
7/19/2011	3:33:46 PM	Bubbler valve closed
7/19/2011	3:33:47 PM	Helium MFC set to  0.000000
7/19/2011	3:33:47 PM	H2 MFC set to  0.000000
7/19/2011	3:33:47 PM	BCl3 MFC set to  0.000000
7/19/2011	3:33:47 PM	PHl3 MFC set to  0.000000
7/19/2011	3:33:47 PM	SiCl4 MFC set to  0.000000
7/19/2011	3:33:47 PM	Bypass solenoid MFC set to  0.000000
7/19/2011	3:33:47 PM	Tube furnace set to 0
7/19/2011	3:33:50 PM	H2 valve closed
7/19/2011	3:33:50 PM	BCl3 valve closed
7/19/2011	3:33:50 PM	PH3 valve closed
7/19/2011	3:33:50 PM	SiCl4 pre valve closed
7/19/2011	3:33:50 PM	SiCl4 post valve closed
7/19/2011	3:33:50 PM	Main Vac valve closed
7/19/2011	3:33:50 PM	Bypass valve closed
7/19/2011	3:33:50 PM	Bubbler valve closed
7/19/2011	3:33:50 PM	Helium valve opened
7/19/2011	3:33:50 PM	Helium MFC set to  500.000000
7/19/2011	3:33:50 PM	H2 MFC set to  0.000000
7/19/2011	3:33:50 PM	BCl3 MFC set to  0.000000
7/19/2011	3:33:50 PM	PHl3 MFC set to  0.000000
7/19/2011	3:33:50 PM	SiCl4 MFC set to  0.000000
7/19/2011	3:33:50 PM	Bypass solenoid MFC set to  0.000000
7/19/2011	3:33:50 PM	Tube furnace set to 0
7/19/2011	3:33:56 PM	Helium valve closed
7/19/2011	3:33:56 PM	H2 valve closed
7/19/2011	3:33:56 PM	BCl3 valve closed
7/19/2011	3:33:56 PM	PH3 valve closed
7/19/2011	3:33:56 PM	SiCl4 pre valve closed
7/19/2011	3:33:56 PM	SiCl4 post valve closed
7/19/2011	3:33:56 PM	Main Vac valve closed
7/19/2011	3:33:56 PM	Bypass valve closed
7/19/2011	3:33:56 PM	Bubbler valve closed
7/19/2011	3:33:56 PM	Helium MFC set to  0.000000
7/19/2011	3:33:56 PM	H2 MFC set to  0.000000
7/19/2011	3:33:56 PM	BCl3 MFC set to  0.000000
7/19/2011	3:33:56 PM	PHl3 MFC set to  0.000000
7/19/2011	3:33:56 PM	SiCl4 MFC set to  0.000000
7/19/2011	3:33:56 PM	Bypass solenoid MFC set to  0.000000
7/19/2011	3:33:56 PM	Tube furnace set to 0
7/19/2011	3:33:57 PM	Run finished at 3:33 PM
7/19/2011	3:33:57 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/19/2011	3:43:51 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/19/2011	3:43:52 PM	Recipe started at 3:43 PM
7/19/2011	3:43:52 PM	Helium valve closed
7/19/2011	3:43:52 PM	H2 valve closed
7/19/2011	3:43:52 PM	BCl3 valve closed
7/19/2011	3:43:52 PM	PH3 valve closed
7/19/2011	3:43:52 PM	SiCl4 pre valve closed
7/19/2011	3:43:52 PM	SiCl4 post valve closed
7/19/2011	3:43:52 PM	Main Vac valve closed
7/19/2011	3:43:52 PM	Bubbler valve closed
7/19/2011	3:43:52 PM	Bypass valve opened
7/19/2011	3:43:52 PM	Helium MFC set to  0.000000
7/19/2011	3:43:52 PM	H2 MFC set to  0.000000
7/19/2011	3:43:52 PM	BCl3 MFC set to  0.000000
7/19/2011	3:43:52 PM	PHl3 MFC set to  0.000000
7/19/2011	3:43:52 PM	SiCl4 MFC set to  0.000000
7/19/2011	3:43:52 PM	Bypass solenoid MFC set to  0.000000
7/19/2011	3:43:53 PM	Tube furnace set to 0
7/19/2011	3:44:55 PM	Helium valve closed
7/19/2011	3:44:55 PM	H2 valve closed
7/19/2011	3:44:55 PM	BCl3 valve closed
7/19/2011	3:44:55 PM	PH3 valve closed
7/19/2011	3:44:55 PM	SiCl4 pre valve closed
7/19/2011	3:44:55 PM	SiCl4 post valve closed
7/19/2011	3:44:55 PM	Main Vac valve closed
7/19/2011	3:44:55 PM	Bubbler valve closed
7/19/2011	3:44:55 PM	Bypass valve opened
7/19/2011	3:44:55 PM	Helium MFC set to  0.000000
7/19/2011	3:44:55 PM	H2 MFC set to  0.000000
7/19/2011	3:44:55 PM	BCl3 MFC set to  0.000000
7/19/2011	3:44:55 PM	PHl3 MFC set to  0.000000
7/19/2011	3:44:55 PM	SiCl4 MFC set to  0.000000
7/19/2011	3:44:55 PM	Bypass solenoid MFC set to  0.000000
7/19/2011	3:44:55 PM	Tube furnace set to 0
7/19/2011	3:45:55 PM	Helium valve closed
7/19/2011	3:45:55 PM	H2 valve closed
7/19/2011	3:45:55 PM	BCl3 valve closed
7/19/2011	3:45:55 PM	PH3 valve closed
7/19/2011	3:45:55 PM	SiCl4 pre valve closed
7/19/2011	3:45:55 PM	SiCl4 post valve closed
7/19/2011	3:45:55 PM	Bypass valve closed
7/19/2011	3:45:55 PM	Bubbler valve closed
7/19/2011	3:45:55 PM	Main Vac valve opened
7/19/2011	3:45:55 PM	Helium MFC set to  0.000000
7/19/2011	3:45:55 PM	H2 MFC set to  0.000000
7/19/2011	3:45:55 PM	BCl3 MFC set to  0.000000
7/19/2011	3:45:55 PM	PHl3 MFC set to  0.000000
7/19/2011	3:45:55 PM	SiCl4 MFC set to  0.000000
7/19/2011	3:45:55 PM	Bypass solenoid MFC set to  0.000000
7/19/2011	3:45:55 PM	Tube furnace set to 0
7/19/2011	3:45:56 PM	Run finished at 3:45 PM
7/19/2011	3:45:56 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/19/2011	4:01:08 PM	Program exited cleanly
7/19/2011	4:01:11 PM	Program started normally
7/19/2011	4:01:11 PM	Helium valve closed
7/19/2011	4:01:11 PM	H2 valve closed
7/19/2011	4:01:11 PM	BCl3 valve closed
7/19/2011	4:01:11 PM	PH3 valve closed
7/19/2011	4:01:11 PM	SiCl4 pre valve closed
7/19/2011	4:01:11 PM	SiCl4 post valve closed
7/19/2011	4:01:11 PM	Main Vac valve closed
7/19/2011	4:01:11 PM	Bypass valve closed
7/19/2011	4:01:11 PM	Bubbler valve closed
7/19/2011	4:01:11 PM	Helium MFC set to  0.000000
7/19/2011	4:01:11 PM	H2 MFC set to  0.000000
7/19/2011	4:01:11 PM	BCl3 MFC set to  0.000000
7/19/2011	4:01:11 PM	PHl3 MFC set to  0.000000
7/19/2011	4:01:11 PM	SiCl4 MFC set to  0.000000
7/19/2011	4:01:11 PM	Bypass solenoid MFC set to  760.000000
7/19/2011	4:01:11 PM	Tube furnace set to 0
7/19/2011	4:01:12 PM	Main Vac valve opened
7/19/2011	4:01:36 PM	Program exited cleanly
7/19/2011	4:04:12 PM	Program started normally
7/19/2011	4:04:12 PM	Helium valve closed
7/19/2011	4:04:12 PM	H2 valve closed
7/19/2011	4:04:12 PM	BCl3 valve closed
7/19/2011	4:04:12 PM	PH3 valve closed
7/19/2011	4:04:12 PM	SiCl4 pre valve closed
7/19/2011	4:04:12 PM	SiCl4 post valve closed
7/19/2011	4:04:12 PM	Main Vac valve closed
7/19/2011	4:04:12 PM	Bypass valve closed
7/19/2011	4:04:12 PM	Bubbler valve closed
7/19/2011	4:04:12 PM	Helium MFC set to  0.000000
7/19/2011	4:04:12 PM	H2 MFC set to  0.000000
7/19/2011	4:04:12 PM	BCl3 MFC set to  0.000000
7/19/2011	4:04:12 PM	PHl3 MFC set to  0.000000
7/19/2011	4:04:12 PM	SiCl4 MFC set to  0.000000
7/19/2011	4:04:12 PM	Bypass solenoid MFC set to  760.000000
7/19/2011	4:04:12 PM	Tube furnace set to 0
7/19/2011	4:11:40 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
7/19/2011	4:11:53 PM	Recipe started at 4:11 PM
7/19/2011	4:11:53 PM	Helium valve closed
7/19/2011	4:11:53 PM	H2 valve closed
7/19/2011	4:11:53 PM	BCl3 valve closed
7/19/2011	4:11:53 PM	PH3 valve closed
7/19/2011	4:11:53 PM	SiCl4 pre valve closed
7/19/2011	4:11:53 PM	SiCl4 post valve closed
7/19/2011	4:11:53 PM	Main Vac valve closed
7/19/2011	4:11:53 PM	Bubbler valve closed
7/19/2011	4:11:53 PM	Bypass valve opened
7/19/2011	4:11:53 PM	Helium MFC set to  0.000000
7/19/2011	4:11:53 PM	H2 MFC set to  0.000000
7/19/2011	4:11:53 PM	BCl3 MFC set to  0.000000
7/19/2011	4:11:53 PM	PHl3 MFC set to  0.000000
7/19/2011	4:11:53 PM	SiCl4 MFC set to  0.000000
7/19/2011	4:11:53 PM	Bypass solenoid MFC set to  0.000000
7/19/2011	4:11:53 PM	Tube furnace set to 0
7/19/2011	4:11:53 PM	Helium valve closed
7/19/2011	4:11:53 PM	H2 valve closed
7/19/2011	4:11:53 PM	BCl3 valve closed
7/19/2011	4:11:53 PM	PH3 valve closed
7/19/2011	4:11:53 PM	SiCl4 pre valve closed
7/19/2011	4:11:53 PM	SiCl4 post valve closed
7/19/2011	4:11:53 PM	Main Vac valve closed
7/19/2011	4:11:53 PM	Bubbler valve closed
7/19/2011	4:11:53 PM	Bypass valve opened
7/19/2011	4:11:53 PM	Helium MFC set to  0.000000
7/19/2011	4:11:53 PM	H2 MFC set to  0.000000
7/19/2011	4:11:53 PM	BCl3 MFC set to  0.000000
7/19/2011	4:11:53 PM	PHl3 MFC set to  0.000000
7/19/2011	4:11:53 PM	SiCl4 MFC set to  0.000000
7/19/2011	4:11:53 PM	Bypass solenoid MFC set to  0.000000
7/19/2011	4:11:54 PM	Tube furnace set to 0
7/19/2011	4:11:59 PM	Helium valve closed
7/19/2011	4:11:59 PM	H2 valve closed
7/19/2011	4:11:59 PM	BCl3 valve closed
7/19/2011	4:11:59 PM	PH3 valve closed
7/19/2011	4:11:59 PM	SiCl4 pre valve closed
7/19/2011	4:11:59 PM	SiCl4 post valve closed
7/19/2011	4:11:59 PM	Bypass valve closed
7/19/2011	4:11:59 PM	Bubbler valve closed
7/19/2011	4:11:59 PM	Main Vac valve opened
7/19/2011	4:11:59 PM	Helium MFC set to  0.000000
7/19/2011	4:11:59 PM	H2 MFC set to  0.000000
7/19/2011	4:11:59 PM	BCl3 MFC set to  0.000000
7/19/2011	4:11:59 PM	PHl3 MFC set to  0.000000
7/19/2011	4:11:59 PM	SiCl4 MFC set to  0.000000
7/19/2011	4:11:59 PM	Bypass solenoid MFC set to  0.000000
7/19/2011	4:11:59 PM	Tube furnace set to 0
7/19/2011	4:12:20 PM	Run aborted at 4:12 PM
7/19/2011	4:12:20 PM	Helium valve closed
7/19/2011	4:12:20 PM	H2 valve closed
7/19/2011	4:12:20 PM	BCl3 valve closed
7/19/2011	4:12:20 PM	PH3 valve closed
7/19/2011	4:12:20 PM	SiCl4 pre valve closed
7/19/2011	4:12:20 PM	SiCl4 post valve closed
7/19/2011	4:12:20 PM	Bypass valve closed
7/19/2011	4:12:20 PM	Main Vac valve closed
7/19/2011	4:12:20 PM	Bubbler valve closed
7/19/2011	4:12:20 PM	Helium MFC set to  0.000000
7/19/2011	4:12:20 PM	H2 MFC set to  0.000000
7/19/2011	4:12:20 PM	BCl3 MFC set to  0.000000
7/19/2011	4:12:20 PM	PHl3 MFC set to  0.000000
7/19/2011	4:12:20 PM	SiCl4 MFC set to  0.000000
7/19/2011	4:12:21 PM	Tube furnace set to 0
7/19/2011	4:12:21 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
7/19/2011	4:12:22 PM	Main Vac valve opened
7/19/2011	4:12:29 PM	Program exited cleanly
7/19/2011	4:12:30 PM	Program started normally
7/19/2011	4:12:30 PM	Helium valve closed
7/19/2011	4:12:30 PM	H2 valve closed
7/19/2011	4:12:30 PM	BCl3 valve closed
7/19/2011	4:12:30 PM	PH3 valve closed
7/19/2011	4:12:30 PM	SiCl4 pre valve closed
7/19/2011	4:12:30 PM	SiCl4 post valve closed
7/19/2011	4:12:30 PM	Main Vac valve closed
7/19/2011	4:12:30 PM	Bypass valve closed
7/19/2011	4:12:30 PM	Bubbler valve closed
7/19/2011	4:12:30 PM	Helium MFC set to  0.000000
7/19/2011	4:12:30 PM	H2 MFC set to  0.000000
7/19/2011	4:12:30 PM	BCl3 MFC set to  0.000000
7/19/2011	4:12:30 PM	PHl3 MFC set to  0.000000
7/19/2011	4:12:30 PM	SiCl4 MFC set to  0.000000
7/19/2011	4:12:30 PM	Bypass solenoid MFC set to  760.000000
7/19/2011	4:12:30 PM	Tube furnace set to 0
7/19/2011	4:12:33 PM	Main Vac valve opened
7/19/2011	4:13:06 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
7/19/2011	4:13:19 PM	Recipe started at 4:13 PM
7/19/2011	4:13:19 PM	Helium valve closed
7/19/2011	4:13:19 PM	H2 valve closed
7/19/2011	4:13:19 PM	BCl3 valve closed
7/19/2011	4:13:19 PM	PH3 valve closed
7/19/2011	4:13:19 PM	SiCl4 pre valve closed
7/19/2011	4:13:19 PM	SiCl4 post valve closed
7/19/2011	4:13:19 PM	Main Vac valve closed
7/19/2011	4:13:19 PM	Bubbler valve closed
7/19/2011	4:13:19 PM	Bypass valve opened
7/19/2011	4:13:19 PM	Helium MFC set to  0.000000
7/19/2011	4:13:19 PM	H2 MFC set to  0.000000
7/19/2011	4:13:19 PM	BCl3 MFC set to  0.000000
7/19/2011	4:13:19 PM	PHl3 MFC set to  0.000000
7/19/2011	4:13:19 PM	SiCl4 MFC set to  0.000000
7/19/2011	4:13:19 PM	Bypass solenoid MFC set to  0.000000
7/19/2011	4:13:19 PM	Tube furnace set to 0
7/19/2011	4:13:19 PM	Helium valve closed
7/19/2011	4:13:19 PM	H2 valve closed
7/19/2011	4:13:19 PM	BCl3 valve closed
7/19/2011	4:13:19 PM	PH3 valve closed
7/19/2011	4:13:19 PM	SiCl4 pre valve closed
7/19/2011	4:13:19 PM	SiCl4 post valve closed
7/19/2011	4:13:19 PM	Main Vac valve closed
7/19/2011	4:13:19 PM	Bubbler valve closed
7/19/2011	4:13:19 PM	Bypass valve opened
7/19/2011	4:13:19 PM	Helium MFC set to  0.000000
7/19/2011	4:13:19 PM	H2 MFC set to  0.000000
7/19/2011	4:13:19 PM	BCl3 MFC set to  0.000000
7/19/2011	4:13:19 PM	PHl3 MFC set to  0.000000
7/19/2011	4:13:19 PM	SiCl4 MFC set to  0.000000
7/19/2011	4:13:19 PM	Bypass solenoid MFC set to  0.000000
7/19/2011	4:13:20 PM	Tube furnace set to 0
7/19/2011	4:13:24 PM	Helium valve closed
7/19/2011	4:13:24 PM	H2 valve closed
7/19/2011	4:13:24 PM	BCl3 valve closed
7/19/2011	4:13:24 PM	PH3 valve closed
7/19/2011	4:13:24 PM	SiCl4 pre valve closed
7/19/2011	4:13:24 PM	SiCl4 post valve closed
7/19/2011	4:13:24 PM	Bypass valve closed
7/19/2011	4:13:24 PM	Bubbler valve closed
7/19/2011	4:13:24 PM	Main Vac valve opened
7/19/2011	4:13:24 PM	Helium MFC set to  0.000000
7/19/2011	4:13:24 PM	H2 MFC set to  0.000000
7/19/2011	4:13:24 PM	BCl3 MFC set to  0.000000
7/19/2011	4:13:24 PM	PHl3 MFC set to  0.000000
7/19/2011	4:13:24 PM	SiCl4 MFC set to  0.000000
7/19/2011	4:13:24 PM	Bypass solenoid MFC set to  0.000000
7/19/2011	4:13:24 PM	Tube furnace set to 0
7/19/2011	4:13:34 PM	H2 valve closed
7/19/2011	4:13:34 PM	BCl3 valve closed
7/19/2011	4:13:34 PM	PH3 valve closed
7/19/2011	4:13:34 PM	SiCl4 pre valve closed
7/19/2011	4:13:34 PM	SiCl4 post valve closed
7/19/2011	4:13:34 PM	Bypass valve closed
7/19/2011	4:13:34 PM	Bubbler valve closed
7/19/2011	4:13:34 PM	Helium valve opened
7/19/2011	4:13:34 PM	Main Vac valve opened
7/19/2011	4:13:34 PM	Helium MFC set to  20.000000
7/19/2011	4:13:34 PM	H2 MFC set to  0.000000
7/19/2011	4:13:34 PM	BCl3 MFC set to  0.000000
7/19/2011	4:13:34 PM	PHl3 MFC set to  0.000000
7/19/2011	4:13:34 PM	SiCl4 MFC set to  0.000000
7/19/2011	4:13:34 PM	Bypass solenoid MFC set to  0.000000
7/19/2011	4:13:34 PM	Tube furnace set to 0
7/19/2011	4:14:04 PM	Helium valve closed
7/19/2011	4:14:04 PM	H2 valve closed
7/19/2011	4:14:04 PM	BCl3 valve closed
7/19/2011	4:14:04 PM	PH3 valve closed
7/19/2011	4:14:04 PM	SiCl4 pre valve closed
7/19/2011	4:14:04 PM	SiCl4 post valve closed
7/19/2011	4:14:04 PM	Bypass valve closed
7/19/2011	4:14:04 PM	Bubbler valve closed
7/19/2011	4:14:04 PM	Main Vac valve opened
7/19/2011	4:14:04 PM	Helium MFC set to  0.000000
7/19/2011	4:14:04 PM	H2 MFC set to  0.000000
7/19/2011	4:14:04 PM	BCl3 MFC set to  0.000000
7/19/2011	4:14:04 PM	PHl3 MFC set to  0.000000
7/19/2011	4:14:04 PM	SiCl4 MFC set to  0.000000
7/19/2011	4:14:04 PM	Bypass solenoid MFC set to  0.000000
7/19/2011	4:14:04 PM	Tube furnace set to 0
7/19/2011	4:14:34 PM	H2 valve closed
7/19/2011	4:14:34 PM	BCl3 valve closed
7/19/2011	4:14:34 PM	PH3 valve closed
7/19/2011	4:14:34 PM	SiCl4 pre valve closed
7/19/2011	4:14:34 PM	SiCl4 post valve closed
7/19/2011	4:14:34 PM	Bypass valve closed
7/19/2011	4:14:34 PM	Bubbler valve closed
7/19/2011	4:14:34 PM	Helium valve opened
7/19/2011	4:14:34 PM	Main Vac valve opened
7/19/2011	4:14:34 PM	Helium MFC set to  20.000000
7/19/2011	4:14:34 PM	H2 MFC set to  0.000000
7/19/2011	4:14:34 PM	BCl3 MFC set to  0.000000
7/19/2011	4:14:34 PM	PHl3 MFC set to  0.000000
7/19/2011	4:14:34 PM	SiCl4 MFC set to  0.000000
7/19/2011	4:14:34 PM	Bypass solenoid MFC set to  0.000000
7/19/2011	4:14:34 PM	Tube furnace set to 0
7/19/2011	4:15:04 PM	Helium valve closed
7/19/2011	4:15:04 PM	H2 valve closed
7/19/2011	4:15:04 PM	BCl3 valve closed
7/19/2011	4:15:04 PM	PH3 valve closed
7/19/2011	4:15:04 PM	SiCl4 pre valve closed
7/19/2011	4:15:04 PM	SiCl4 post valve closed
7/19/2011	4:15:05 PM	Bypass valve closed
7/19/2011	4:15:05 PM	Bubbler valve closed
7/19/2011	4:15:05 PM	Main Vac valve opened
7/19/2011	4:15:05 PM	Helium MFC set to  0.000000
7/19/2011	4:15:05 PM	H2 MFC set to  0.000000
7/19/2011	4:15:05 PM	BCl3 MFC set to  0.000000
7/19/2011	4:15:05 PM	PHl3 MFC set to  0.000000
7/19/2011	4:15:05 PM	SiCl4 MFC set to  0.000000
7/19/2011	4:15:05 PM	Bypass solenoid MFC set to  0.000000
7/19/2011	4:15:05 PM	Tube furnace set to 0
7/19/2011	4:15:35 PM	H2 valve closed
7/19/2011	4:15:35 PM	BCl3 valve closed
7/19/2011	4:15:35 PM	PH3 valve closed
7/19/2011	4:15:35 PM	SiCl4 pre valve closed
7/19/2011	4:15:35 PM	SiCl4 post valve closed
7/19/2011	4:15:35 PM	Bypass valve closed
7/19/2011	4:15:35 PM	Bubbler valve closed
7/19/2011	4:15:35 PM	Helium valve opened
7/19/2011	4:15:35 PM	Main Vac valve opened
7/19/2011	4:15:35 PM	Helium MFC set to  20.000000
7/19/2011	4:15:35 PM	H2 MFC set to  0.000000
7/19/2011	4:15:35 PM	BCl3 MFC set to  0.000000
7/19/2011	4:15:35 PM	PHl3 MFC set to  0.000000
7/19/2011	4:15:35 PM	SiCl4 MFC set to  0.000000
7/19/2011	4:15:35 PM	Bypass solenoid MFC set to  0.000000
7/19/2011	4:15:35 PM	Tube furnace set to 0
7/19/2011	4:16:05 PM	Helium valve closed
7/19/2011	4:16:05 PM	H2 valve closed
7/19/2011	4:16:05 PM	BCl3 valve closed
7/19/2011	4:16:05 PM	PH3 valve closed
7/19/2011	4:16:05 PM	SiCl4 pre valve closed
7/19/2011	4:16:05 PM	SiCl4 post valve closed
7/19/2011	4:16:05 PM	Bypass valve closed
7/19/2011	4:16:05 PM	Bubbler valve closed
7/19/2011	4:16:05 PM	Main Vac valve opened
7/19/2011	4:16:05 PM	Helium MFC set to  0.000000
7/19/2011	4:16:05 PM	H2 MFC set to  0.000000
7/19/2011	4:16:05 PM	BCl3 MFC set to  0.000000
7/19/2011	4:16:05 PM	PHl3 MFC set to  0.000000
7/19/2011	4:16:05 PM	SiCl4 MFC set to  0.000000
7/19/2011	4:16:05 PM	Bypass solenoid MFC set to  0.000000
7/19/2011	4:16:05 PM	Tube furnace set to 0
7/19/2011	4:16:35 PM	H2 valve closed
7/19/2011	4:16:35 PM	BCl3 valve closed
7/19/2011	4:16:35 PM	PH3 valve closed
7/19/2011	4:16:35 PM	SiCl4 pre valve closed
7/19/2011	4:16:35 PM	SiCl4 post valve closed
7/19/2011	4:16:35 PM	Bypass valve closed
7/19/2011	4:16:35 PM	Bubbler valve closed
7/19/2011	4:16:35 PM	Helium valve opened
7/19/2011	4:16:35 PM	Main Vac valve opened
7/19/2011	4:16:35 PM	Helium MFC set to  20.000000
7/19/2011	4:16:35 PM	H2 MFC set to  0.000000
7/19/2011	4:16:35 PM	BCl3 MFC set to  0.000000
7/19/2011	4:16:35 PM	PHl3 MFC set to  0.000000
7/19/2011	4:16:35 PM	SiCl4 MFC set to  0.000000
7/19/2011	4:16:35 PM	Bypass solenoid MFC set to  0.000000
7/19/2011	4:16:35 PM	Tube furnace set to 0
7/19/2011	4:17:05 PM	Helium valve closed
7/19/2011	4:17:05 PM	H2 valve closed
7/19/2011	4:17:05 PM	BCl3 valve closed
7/19/2011	4:17:05 PM	PH3 valve closed
7/19/2011	4:17:05 PM	SiCl4 pre valve closed
7/19/2011	4:17:05 PM	SiCl4 post valve closed
7/19/2011	4:17:05 PM	Bypass valve closed
7/19/2011	4:17:05 PM	Bubbler valve closed
7/19/2011	4:17:05 PM	Main Vac valve opened
7/19/2011	4:17:05 PM	Helium MFC set to  0.000000
7/19/2011	4:17:05 PM	H2 MFC set to  0.000000
7/19/2011	4:17:05 PM	BCl3 MFC set to  0.000000
7/19/2011	4:17:05 PM	PHl3 MFC set to  0.000000
7/19/2011	4:17:05 PM	SiCl4 MFC set to  0.000000
7/19/2011	4:17:05 PM	Bypass solenoid MFC set to  0.000000
7/19/2011	4:17:05 PM	Tube furnace set to 0
7/19/2011	4:17:35 PM	H2 valve closed
7/19/2011	4:17:35 PM	BCl3 valve closed
7/19/2011	4:17:35 PM	PH3 valve closed
7/19/2011	4:17:35 PM	SiCl4 pre valve closed
7/19/2011	4:17:35 PM	SiCl4 post valve closed
7/19/2011	4:17:35 PM	Bypass valve closed
7/19/2011	4:17:36 PM	Bubbler valve closed
7/19/2011	4:17:36 PM	Helium valve opened
7/19/2011	4:17:36 PM	Main Vac valve opened
7/19/2011	4:17:36 PM	Helium MFC set to  20.000000
7/19/2011	4:17:36 PM	H2 MFC set to  0.000000
7/19/2011	4:17:36 PM	BCl3 MFC set to  0.000000
7/19/2011	4:17:36 PM	PHl3 MFC set to  0.000000
7/19/2011	4:17:36 PM	SiCl4 MFC set to  0.000000
7/19/2011	4:17:36 PM	Bypass solenoid MFC set to  0.000000
7/19/2011	4:17:36 PM	Tube furnace set to 0
7/19/2011	4:18:06 PM	Helium valve closed
7/19/2011	4:18:06 PM	H2 valve closed
7/19/2011	4:18:06 PM	BCl3 valve closed
7/19/2011	4:18:06 PM	PH3 valve closed
7/19/2011	4:18:06 PM	SiCl4 pre valve closed
7/19/2011	4:18:06 PM	SiCl4 post valve closed
7/19/2011	4:18:06 PM	Bypass valve closed
7/19/2011	4:18:06 PM	Bubbler valve closed
7/19/2011	4:18:06 PM	Main Vac valve opened
7/19/2011	4:18:06 PM	Helium MFC set to  0.000000
7/19/2011	4:18:06 PM	H2 MFC set to  0.000000
7/19/2011	4:18:06 PM	BCl3 MFC set to  0.000000
7/19/2011	4:18:06 PM	PHl3 MFC set to  0.000000
7/19/2011	4:18:06 PM	SiCl4 MFC set to  0.000000
7/19/2011	4:18:06 PM	Bypass solenoid MFC set to  0.000000
7/19/2011	4:18:06 PM	Tube furnace set to 0
7/19/2011	4:18:36 PM	H2 valve closed
7/19/2011	4:18:36 PM	BCl3 valve closed
7/19/2011	4:18:36 PM	PH3 valve closed
7/19/2011	4:18:36 PM	SiCl4 pre valve closed
7/19/2011	4:18:36 PM	SiCl4 post valve closed
7/19/2011	4:18:36 PM	Bypass valve closed
7/19/2011	4:18:36 PM	Bubbler valve closed
7/19/2011	4:18:36 PM	Helium valve opened
7/19/2011	4:18:36 PM	Main Vac valve opened
7/19/2011	4:18:36 PM	Helium MFC set to  20.000000
7/19/2011	4:18:36 PM	H2 MFC set to  0.000000
7/19/2011	4:18:36 PM	BCl3 MFC set to  0.000000
7/19/2011	4:18:36 PM	PHl3 MFC set to  0.000000
7/19/2011	4:18:36 PM	SiCl4 MFC set to  0.000000
7/19/2011	4:18:36 PM	Bypass solenoid MFC set to  0.000000
7/19/2011	4:18:36 PM	Tube furnace set to 0
7/19/2011	4:19:06 PM	Helium valve closed
7/19/2011	4:19:06 PM	H2 valve closed
7/19/2011	4:19:06 PM	BCl3 valve closed
7/19/2011	4:19:06 PM	PH3 valve closed
7/19/2011	4:19:06 PM	SiCl4 pre valve closed
7/19/2011	4:19:06 PM	SiCl4 post valve closed
7/19/2011	4:19:06 PM	Bypass valve closed
7/19/2011	4:19:06 PM	Bubbler valve closed
7/19/2011	4:19:06 PM	Main Vac valve opened
7/19/2011	4:19:06 PM	Helium MFC set to  0.000000
7/19/2011	4:19:06 PM	H2 MFC set to  0.000000
7/19/2011	4:19:06 PM	BCl3 MFC set to  0.000000
7/19/2011	4:19:06 PM	PHl3 MFC set to  0.000000
7/19/2011	4:19:06 PM	SiCl4 MFC set to  0.000000
7/19/2011	4:19:06 PM	Bypass solenoid MFC set to  0.000000
7/19/2011	4:19:06 PM	Tube furnace set to 0
7/19/2011	4:19:36 PM	H2 valve closed
7/19/2011	4:19:36 PM	BCl3 valve closed
7/19/2011	4:19:36 PM	PH3 valve closed
7/19/2011	4:19:36 PM	SiCl4 pre valve closed
7/19/2011	4:19:36 PM	SiCl4 post valve closed
7/19/2011	4:19:36 PM	Bypass valve closed
7/19/2011	4:19:36 PM	Bubbler valve closed
7/19/2011	4:19:36 PM	Helium valve opened
7/19/2011	4:19:36 PM	Main Vac valve opened
7/19/2011	4:19:36 PM	Helium MFC set to  20.000000
7/19/2011	4:19:36 PM	H2 MFC set to  0.000000
7/19/2011	4:19:36 PM	BCl3 MFC set to  0.000000
7/19/2011	4:19:36 PM	PHl3 MFC set to  0.000000
7/19/2011	4:19:36 PM	SiCl4 MFC set to  0.000000
7/19/2011	4:19:36 PM	Bypass solenoid MFC set to  0.000000
7/19/2011	4:19:36 PM	Tube furnace set to 0
7/19/2011	4:20:06 PM	Helium valve closed
7/19/2011	4:20:06 PM	H2 valve closed
7/19/2011	4:20:06 PM	BCl3 valve closed
7/19/2011	4:20:07 PM	PH3 valve closed
7/19/2011	4:20:07 PM	SiCl4 pre valve closed
7/19/2011	4:20:07 PM	SiCl4 post valve closed
7/19/2011	4:20:07 PM	Bypass valve closed
7/19/2011	4:20:07 PM	Bubbler valve closed
7/19/2011	4:20:07 PM	Main Vac valve opened
7/19/2011	4:20:07 PM	Helium MFC set to  0.000000
7/19/2011	4:20:07 PM	H2 MFC set to  0.000000
7/19/2011	4:20:07 PM	BCl3 MFC set to  0.000000
7/19/2011	4:20:07 PM	PHl3 MFC set to  0.000000
7/19/2011	4:20:07 PM	SiCl4 MFC set to  0.000000
7/19/2011	4:20:07 PM	Bypass solenoid MFC set to  0.000000
7/19/2011	4:20:07 PM	Tube furnace set to 0
7/19/2011	4:20:37 PM	H2 valve closed
7/19/2011	4:20:37 PM	BCl3 valve closed
7/19/2011	4:20:37 PM	PH3 valve closed
7/19/2011	4:20:37 PM	SiCl4 pre valve closed
7/19/2011	4:20:37 PM	SiCl4 post valve closed
7/19/2011	4:20:37 PM	Bypass valve closed
7/19/2011	4:20:37 PM	Bubbler valve closed
7/19/2011	4:20:37 PM	Helium valve opened
7/19/2011	4:20:37 PM	Main Vac valve opened
7/19/2011	4:20:37 PM	Helium MFC set to  20.000000
7/19/2011	4:20:37 PM	H2 MFC set to  0.000000
7/19/2011	4:20:37 PM	BCl3 MFC set to  0.000000
7/19/2011	4:20:37 PM	PHl3 MFC set to  0.000000
7/19/2011	4:20:37 PM	SiCl4 MFC set to  0.000000
7/19/2011	4:20:37 PM	Bypass solenoid MFC set to  0.000000
7/19/2011	4:20:37 PM	Tube furnace set to 0
7/19/2011	4:21:07 PM	Helium valve closed
7/19/2011	4:21:07 PM	H2 valve closed
7/19/2011	4:21:07 PM	BCl3 valve closed
7/19/2011	4:21:07 PM	PH3 valve closed
7/19/2011	4:21:07 PM	SiCl4 pre valve closed
7/19/2011	4:21:07 PM	SiCl4 post valve closed
7/19/2011	4:21:07 PM	Bypass valve closed
7/19/2011	4:21:07 PM	Bubbler valve closed
7/19/2011	4:21:07 PM	Main Vac valve opened
7/19/2011	4:21:07 PM	Helium MFC set to  0.000000
7/19/2011	4:21:07 PM	H2 MFC set to  0.000000
7/19/2011	4:21:07 PM	BCl3 MFC set to  0.000000
7/19/2011	4:21:07 PM	PHl3 MFC set to  0.000000
7/19/2011	4:21:07 PM	SiCl4 MFC set to  0.000000
7/19/2011	4:21:07 PM	Bypass solenoid MFC set to  0.000000
7/19/2011	4:21:07 PM	Tube furnace set to 0
7/19/2011	4:21:37 PM	H2 valve closed
7/19/2011	4:21:37 PM	BCl3 valve closed
7/19/2011	4:21:37 PM	PH3 valve closed
7/19/2011	4:21:37 PM	SiCl4 pre valve closed
7/19/2011	4:21:37 PM	SiCl4 post valve closed
7/19/2011	4:21:37 PM	Bypass valve closed
7/19/2011	4:21:37 PM	Bubbler valve closed
7/19/2011	4:21:37 PM	Helium valve opened
7/19/2011	4:21:37 PM	Main Vac valve opened
7/19/2011	4:21:37 PM	Helium MFC set to  20.000000
7/19/2011	4:21:37 PM	H2 MFC set to  0.000000
7/19/2011	4:21:37 PM	BCl3 MFC set to  0.000000
7/19/2011	4:21:37 PM	PHl3 MFC set to  0.000000
7/19/2011	4:21:37 PM	SiCl4 MFC set to  0.000000
7/19/2011	4:21:37 PM	Bypass solenoid MFC set to  0.000000
7/19/2011	4:21:37 PM	Tube furnace set to 0
7/19/2011	4:22:07 PM	Helium valve closed
7/19/2011	4:22:07 PM	H2 valve closed
7/19/2011	4:22:07 PM	BCl3 valve closed
7/19/2011	4:22:07 PM	PH3 valve closed
7/19/2011	4:22:07 PM	SiCl4 pre valve closed
7/19/2011	4:22:07 PM	SiCl4 post valve closed
7/19/2011	4:22:07 PM	Bypass valve closed
7/19/2011	4:22:07 PM	Bubbler valve closed
7/19/2011	4:22:07 PM	Main Vac valve opened
7/19/2011	4:22:07 PM	Helium MFC set to  0.000000
7/19/2011	4:22:07 PM	H2 MFC set to  0.000000
7/19/2011	4:22:07 PM	BCl3 MFC set to  0.000000
7/19/2011	4:22:07 PM	PHl3 MFC set to  0.000000
7/19/2011	4:22:07 PM	SiCl4 MFC set to  0.000000
7/19/2011	4:22:07 PM	Bypass solenoid MFC set to  0.000000
7/19/2011	4:22:07 PM	Tube furnace set to 0
7/19/2011	4:22:38 PM	H2 valve closed
7/19/2011	4:22:38 PM	BCl3 valve closed
7/19/2011	4:22:38 PM	PH3 valve closed
7/19/2011	4:22:38 PM	SiCl4 pre valve closed
7/19/2011	4:22:38 PM	SiCl4 post valve closed
7/19/2011	4:22:38 PM	Bypass valve closed
7/19/2011	4:22:38 PM	Bubbler valve closed
7/19/2011	4:22:38 PM	Helium valve opened
7/19/2011	4:22:38 PM	Main Vac valve opened
7/19/2011	4:22:38 PM	Helium MFC set to  20.000000
7/19/2011	4:22:38 PM	H2 MFC set to  0.000000
7/19/2011	4:22:38 PM	BCl3 MFC set to  0.000000
7/19/2011	4:22:38 PM	PHl3 MFC set to  0.000000
7/19/2011	4:22:38 PM	SiCl4 MFC set to  0.000000
7/19/2011	4:22:38 PM	Bypass solenoid MFC set to  0.000000
7/19/2011	4:22:38 PM	Tube furnace set to 0
7/19/2011	4:23:08 PM	H2 valve closed
7/19/2011	4:23:08 PM	BCl3 valve closed
7/19/2011	4:23:08 PM	PH3 valve closed
7/19/2011	4:23:08 PM	SiCl4 pre valve closed
7/19/2011	4:23:08 PM	SiCl4 post valve closed
7/19/2011	4:23:08 PM	Bypass valve closed
7/19/2011	4:23:08 PM	Bubbler valve closed
7/19/2011	4:23:08 PM	Helium valve opened
7/19/2011	4:23:08 PM	Main Vac valve opened
7/19/2011	4:23:08 PM	Helium MFC set to  20.000000
7/19/2011	4:23:08 PM	H2 MFC set to  0.000000
7/19/2011	4:23:08 PM	BCl3 MFC set to  0.000000
7/19/2011	4:23:08 PM	PHl3 MFC set to  0.000000
7/19/2011	4:23:08 PM	SiCl4 MFC set to  0.000000
7/19/2011	4:23:08 PM	Bypass solenoid MFC set to  0.000000
7/19/2011	4:23:08 PM	Tube furnace set to 0
7/19/2011	4:23:09 PM	Run finished at 4:23 PM
7/19/2011	4:23:09 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
7/19/2011	4:23:45 PM	Helium valve closed
7/19/2011	4:23:50 PM	Helium MFC set to  0.000000
7/19/2011	4:26:19 PM	Main Vac valve closed
7/19/2011	4:26:35 PM	Main Vac valve opened
7/19/2011	4:27:32 PM	Recipe started at 4:27 PM
7/19/2011	4:27:32 PM	Helium valve closed
7/19/2011	4:27:32 PM	H2 valve closed
7/19/2011	4:27:32 PM	BCl3 valve closed
7/19/2011	4:27:32 PM	PH3 valve closed
7/19/2011	4:27:32 PM	SiCl4 pre valve closed
7/19/2011	4:27:32 PM	SiCl4 post valve closed
7/19/2011	4:27:32 PM	Main Vac valve closed
7/19/2011	4:27:32 PM	Bypass valve closed
7/19/2011	4:27:32 PM	Bubbler valve closed
7/19/2011	4:27:32 PM	Helium MFC set to  0.000000
7/19/2011	4:27:32 PM	H2 MFC set to  0.000000
7/19/2011	4:27:32 PM	BCl3 MFC set to  0.000000
7/19/2011	4:27:32 PM	PHl3 MFC set to  0.000000
7/19/2011	4:27:32 PM	SiCl4 MFC set to  0.000000
7/19/2011	4:27:32 PM	Bypass solenoid MFC set to  0.000000
7/19/2011	4:27:32 PM	Tube furnace set to 0
7/19/2011	4:27:35 PM	Helium valve closed
7/19/2011	4:27:35 PM	BCl3 valve closed
7/19/2011	4:27:35 PM	PH3 valve closed
7/19/2011	4:27:35 PM	SiCl4 pre valve closed
7/19/2011	4:27:35 PM	SiCl4 post valve closed
7/19/2011	4:27:35 PM	Main Vac valve closed
7/19/2011	4:27:35 PM	Bypass valve closed
7/19/2011	4:27:35 PM	Bubbler valve closed
7/19/2011	4:27:35 PM	H2 valve opened
7/19/2011	4:27:35 PM	Helium MFC set to  0.000000
7/19/2011	4:27:35 PM	H2 MFC set to  500.000000
7/19/2011	4:27:35 PM	BCl3 MFC set to  0.000000
7/19/2011	4:27:35 PM	PHl3 MFC set to  0.000000
7/19/2011	4:27:35 PM	SiCl4 MFC set to  0.000000
7/19/2011	4:27:35 PM	Bypass solenoid MFC set to  0.000000
7/19/2011	4:27:35 PM	Tube furnace set to 0
7/19/2011	4:28:39 PM	Helium valve closed
7/19/2011	4:28:39 PM	BCl3 valve closed
7/19/2011	4:28:39 PM	PH3 valve closed
7/19/2011	4:28:39 PM	SiCl4 pre valve closed
7/19/2011	4:28:39 PM	SiCl4 post valve closed
7/19/2011	4:28:39 PM	Main Vac valve closed
7/19/2011	4:28:39 PM	Bypass valve closed
7/19/2011	4:28:39 PM	H2 valve opened
7/19/2011	4:28:39 PM	Bubbler valve opened
7/19/2011	4:28:39 PM	Helium MFC set to  0.000000
7/19/2011	4:28:39 PM	H2 MFC set to  500.000000
7/19/2011	4:28:39 PM	BCl3 MFC set to  0.000000
7/19/2011	4:28:39 PM	PHl3 MFC set to  0.000000
7/19/2011	4:28:39 PM	SiCl4 MFC set to  0.000000
7/19/2011	4:28:39 PM	Bypass solenoid MFC set to  0.000000
7/19/2011	4:28:39 PM	Tube furnace set to 0
7/19/2011	4:28:40 PM	Helium valve closed
7/19/2011	4:28:40 PM	BCl3 valve closed
7/19/2011	4:28:40 PM	PH3 valve closed
7/19/2011	4:28:40 PM	SiCl4 pre valve closed
7/19/2011	4:28:40 PM	SiCl4 post valve closed
7/19/2011	4:28:40 PM	Main Vac valve closed
7/19/2011	4:28:40 PM	Bypass valve closed
7/19/2011	4:28:40 PM	H2 valve opened
7/19/2011	4:28:40 PM	Bubbler valve opened
7/19/2011	4:28:40 PM	Helium MFC set to  0.000000
7/19/2011	4:28:40 PM	H2 MFC set to  500.000000
7/19/2011	4:28:40 PM	BCl3 MFC set to  0.000000
7/19/2011	4:28:40 PM	PHl3 MFC set to  0.000000
7/19/2011	4:28:40 PM	SiCl4 MFC set to  0.000000
7/19/2011	4:28:40 PM	Bypass solenoid MFC set to  0.000000
7/19/2011	4:28:40 PM	Tube furnace set to 1000
7/19/2011	4:48:40 PM	Helium valve closed
7/19/2011	4:48:40 PM	PH3 valve closed
7/19/2011	4:48:40 PM	Main Vac valve closed
7/19/2011	4:48:40 PM	Bypass valve closed
7/19/2011	4:48:40 PM	H2 valve opened
7/19/2011	4:48:40 PM	BCl3 valve opened
7/19/2011	4:48:40 PM	SiCl4 pre valve opened
7/19/2011	4:48:40 PM	SiCl4 post valve opened
7/19/2011	4:48:40 PM	Bubbler valve opened
7/19/2011	4:48:40 PM	Helium MFC set to  0.000000
7/19/2011	4:48:40 PM	H2 MFC set to  500.000000
7/19/2011	4:48:40 PM	BCl3 MFC set to  8.000000
7/19/2011	4:48:40 PM	PHl3 MFC set to  0.000000
7/19/2011	4:48:40 PM	SiCl4 MFC set to  50.000000
7/19/2011	4:48:40 PM	Bypass solenoid MFC set to  0.000000
7/19/2011	4:48:40 PM	Tube furnace set to 1000
7/19/2011	5:03:40 PM	Helium valve closed
7/19/2011	5:03:40 PM	BCl3 valve closed
7/19/2011	5:03:40 PM	PH3 valve closed
7/19/2011	5:03:40 PM	SiCl4 pre valve closed
7/19/2011	5:03:41 PM	SiCl4 post valve closed
7/19/2011	5:03:41 PM	Main Vac valve closed
7/19/2011	5:03:41 PM	Bypass valve closed
7/19/2011	5:03:41 PM	H2 valve opened
7/19/2011	5:03:41 PM	Bubbler valve opened
7/19/2011	5:03:41 PM	Helium MFC set to  0.000000
7/19/2011	5:03:41 PM	H2 MFC set to  500.000000
7/19/2011	5:03:41 PM	BCl3 MFC set to  0.000000
7/19/2011	5:03:41 PM	PHl3 MFC set to  0.000000
7/19/2011	5:03:41 PM	SiCl4 MFC set to  0.000000
7/19/2011	5:03:41 PM	Bypass solenoid MFC set to  0.000000
7/19/2011	5:03:41 PM	Tube furnace set to 750
7/19/2011	5:08:41 PM	H2 valve closed
7/19/2011	5:08:41 PM	BCl3 valve closed
7/19/2011	5:08:41 PM	PH3 valve closed
7/19/2011	5:08:41 PM	SiCl4 pre valve closed
7/19/2011	5:08:41 PM	SiCl4 post valve closed
7/19/2011	5:08:41 PM	Main Vac valve closed
7/19/2011	5:08:41 PM	Bypass valve closed
7/19/2011	5:08:41 PM	Helium valve opened
7/19/2011	5:08:41 PM	Bubbler valve opened
7/19/2011	5:08:41 PM	Helium MFC set to  500.000000
7/19/2011	5:08:41 PM	H2 MFC set to  0.000000
7/19/2011	5:08:41 PM	BCl3 MFC set to  0.000000
7/19/2011	5:08:41 PM	PHl3 MFC set to  0.000000
7/19/2011	5:08:41 PM	SiCl4 MFC set to  0.000000
7/19/2011	5:08:41 PM	Bypass solenoid MFC set to  0.000000
7/19/2011	5:08:41 PM	Tube furnace set to 0
7/19/2011	5:28:41 PM	Helium valve closed
7/19/2011	5:28:41 PM	H2 valve closed
7/19/2011	5:28:41 PM	BCl3 valve closed
7/19/2011	5:28:41 PM	PH3 valve closed
7/19/2011	5:28:41 PM	SiCl4 pre valve closed
7/19/2011	5:28:41 PM	SiCl4 post valve closed
7/19/2011	5:28:41 PM	Main Vac valve closed
7/19/2011	5:28:41 PM	Bypass valve closed
7/19/2011	5:28:41 PM	Bubbler valve closed
7/19/2011	5:28:41 PM	Helium MFC set to  0.000000
7/19/2011	5:28:41 PM	H2 MFC set to  0.000000
7/19/2011	5:28:41 PM	BCl3 MFC set to  0.000000
7/19/2011	5:28:41 PM	PHl3 MFC set to  0.000000
7/19/2011	5:28:41 PM	SiCl4 MFC set to  0.000000
7/19/2011	5:28:41 PM	Bypass solenoid MFC set to  0.000000
7/19/2011	5:28:41 PM	Tube furnace set to 0
7/19/2011	5:28:42 PM	Run finished at 5:28 PM
7/19/2011	8:20:48 PM	Helium MFC set to  3.000000
7/19/2011	8:20:49 PM	Helium valve opened
7/19/2011	8:20:50 PM	Helium valve closed
7/19/2011	8:20:51 PM	Helium valve opened
7/19/2011	8:20:53 PM	Helium valve closed
7/19/2011	8:21:06 PM	Helium MFC set to  20.000000
7/19/2011	8:21:08 PM	Helium valve opened
7/19/2011	8:21:11 PM	Helium valve closed
7/19/2011	8:21:45 PM	Helium valve opened
7/19/2011	8:21:49 PM	Helium valve closed
7/19/2011	8:21:51 PM	Helium valve opened
7/19/2011	8:22:00 PM	Helium valve closed
7/19/2011	8:22:06 PM	Helium MFC set to  200.000000
7/19/2011	8:22:08 PM	Helium valve opened
7/19/2011	8:22:30 PM	Helium valve closed
7/19/2011	8:22:39 PM	Helium MFC set to  0.000000
7/19/2011	8:23:46 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/19/2011	8:23:47 PM	Recipe started at 8:23 PM
7/19/2011	8:23:47 PM	Helium valve closed
7/19/2011	8:23:47 PM	H2 valve closed
7/19/2011	8:23:47 PM	BCl3 valve closed
7/19/2011	8:23:47 PM	PH3 valve closed
7/19/2011	8:23:47 PM	SiCl4 pre valve closed
7/19/2011	8:23:47 PM	SiCl4 post valve closed
7/19/2011	8:23:47 PM	Main Vac valve closed
7/19/2011	8:23:47 PM	Bubbler valve closed
7/19/2011	8:23:47 PM	Bypass valve opened
7/19/2011	8:23:47 PM	Helium MFC set to  0.000000
7/19/2011	8:23:47 PM	H2 MFC set to  0.000000
7/19/2011	8:23:47 PM	BCl3 MFC set to  0.000000
7/19/2011	8:23:47 PM	PHl3 MFC set to  0.000000
7/19/2011	8:23:47 PM	SiCl4 MFC set to  0.000000
7/19/2011	8:23:47 PM	Bypass solenoid MFC set to  0.000000
7/19/2011	8:23:47 PM	Tube furnace set to 0
7/19/2011	8:24:40 PM	Helium valve closed
7/19/2011	8:24:40 PM	H2 valve closed
7/19/2011	8:24:40 PM	BCl3 valve closed
7/19/2011	8:24:40 PM	PH3 valve closed
7/19/2011	8:24:40 PM	SiCl4 pre valve closed
7/19/2011	8:24:40 PM	SiCl4 post valve closed
7/19/2011	8:24:40 PM	Main Vac valve closed
7/19/2011	8:24:40 PM	Bubbler valve closed
7/19/2011	8:24:40 PM	Bypass valve opened
7/19/2011	8:24:40 PM	Helium MFC set to  0.000000
7/19/2011	8:24:40 PM	H2 MFC set to  0.000000
7/19/2011	8:24:40 PM	BCl3 MFC set to  0.000000
7/19/2011	8:24:40 PM	PHl3 MFC set to  0.000000
7/19/2011	8:24:40 PM	SiCl4 MFC set to  0.000000
7/19/2011	8:24:40 PM	Bypass solenoid MFC set to  0.000000
7/19/2011	8:24:40 PM	Tube furnace set to 0
7/19/2011	8:25:39 PM	Run aborted at 8:25 PM
7/19/2011	8:25:39 PM	Helium valve closed
7/19/2011	8:25:39 PM	H2 valve closed
7/19/2011	8:25:39 PM	BCl3 valve closed
7/19/2011	8:25:39 PM	PH3 valve closed
7/19/2011	8:25:39 PM	SiCl4 pre valve closed
7/19/2011	8:25:39 PM	SiCl4 post valve closed
7/19/2011	8:25:39 PM	Bypass valve closed
7/19/2011	8:25:39 PM	Main Vac valve closed
7/19/2011	8:25:39 PM	Bubbler valve closed
7/19/2011	8:25:39 PM	Helium MFC set to  0.000000
7/19/2011	8:25:39 PM	H2 MFC set to  0.000000
7/19/2011	8:25:39 PM	BCl3 MFC set to  0.000000
7/19/2011	8:25:39 PM	PHl3 MFC set to  0.000000
7/19/2011	8:25:39 PM	SiCl4 MFC set to  0.000000
7/19/2011	8:25:39 PM	Tube furnace set to 0
7/19/2011	8:25:39 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/19/2011	8:25:43 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/19/2011	8:25:44 PM	Recipe started at 8:25 PM
7/19/2011	8:25:44 PM	Helium valve closed
7/19/2011	8:25:44 PM	H2 valve closed
7/19/2011	8:25:44 PM	BCl3 valve closed
7/19/2011	8:25:44 PM	PH3 valve closed
7/19/2011	8:25:44 PM	SiCl4 pre valve closed
7/19/2011	8:25:44 PM	SiCl4 post valve closed
7/19/2011	8:25:44 PM	Main Vac valve closed
7/19/2011	8:25:44 PM	Bypass valve closed
7/19/2011	8:25:44 PM	Bubbler valve closed
7/19/2011	8:25:44 PM	Helium MFC set to  0.000000
7/19/2011	8:25:44 PM	H2 MFC set to  0.000000
7/19/2011	8:25:44 PM	BCl3 MFC set to  0.000000
7/19/2011	8:25:44 PM	PHl3 MFC set to  0.000000
7/19/2011	8:25:44 PM	SiCl4 MFC set to  0.000000
7/19/2011	8:25:44 PM	Bypass solenoid MFC set to  0.000000
7/19/2011	8:25:44 PM	Tube furnace set to 0
7/19/2011	8:25:47 PM	H2 valve closed
7/19/2011	8:25:47 PM	BCl3 valve closed
7/19/2011	8:25:47 PM	PH3 valve closed
7/19/2011	8:25:47 PM	SiCl4 pre valve closed
7/19/2011	8:25:47 PM	SiCl4 post valve closed
7/19/2011	8:25:47 PM	Main Vac valve closed
7/19/2011	8:25:47 PM	Bypass valve closed
7/19/2011	8:25:47 PM	Bubbler valve closed
7/19/2011	8:25:47 PM	Helium valve opened
7/19/2011	8:25:47 PM	Helium MFC set to  500.000000
7/19/2011	8:25:47 PM	H2 MFC set to  0.000000
7/19/2011	8:25:47 PM	BCl3 MFC set to  0.000000
7/19/2011	8:25:47 PM	PHl3 MFC set to  0.000000
7/19/2011	8:25:47 PM	SiCl4 MFC set to  0.000000
7/19/2011	8:25:47 PM	Bypass solenoid MFC set to  0.000000
7/19/2011	8:25:47 PM	Tube furnace set to 0
7/19/2011	8:26:52 PM	Helium valve closed
7/19/2011	8:26:52 PM	H2 valve closed
7/19/2011	8:26:52 PM	BCl3 valve closed
7/19/2011	8:26:52 PM	PH3 valve closed
7/19/2011	8:26:52 PM	SiCl4 pre valve closed
7/19/2011	8:26:52 PM	SiCl4 post valve closed
7/19/2011	8:26:52 PM	Main Vac valve closed
7/19/2011	8:26:52 PM	Bypass valve closed
7/19/2011	8:26:52 PM	Bubbler valve closed
7/19/2011	8:26:52 PM	Helium MFC set to  0.000000
7/19/2011	8:26:52 PM	H2 MFC set to  0.000000
7/19/2011	8:26:52 PM	BCl3 MFC set to  0.000000
7/19/2011	8:26:52 PM	PHl3 MFC set to  0.000000
7/19/2011	8:26:52 PM	SiCl4 MFC set to  0.000000
7/19/2011	8:26:52 PM	Bypass solenoid MFC set to  0.000000
7/19/2011	8:26:52 PM	Tube furnace set to 0
7/19/2011	8:26:53 PM	Run finished at 8:26 PM
7/19/2011	8:26:53 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/19/2011	8:32:52 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/19/2011	8:32:53 PM	Recipe started at 8:32 PM
7/19/2011	8:32:53 PM	Helium valve closed
7/19/2011	8:32:53 PM	H2 valve closed
7/19/2011	8:32:53 PM	BCl3 valve closed
7/19/2011	8:32:53 PM	PH3 valve closed
7/19/2011	8:32:53 PM	SiCl4 pre valve closed
7/19/2011	8:32:53 PM	SiCl4 post valve closed
7/19/2011	8:32:53 PM	Main Vac valve closed
7/19/2011	8:32:53 PM	Bubbler valve closed
7/19/2011	8:32:53 PM	Bypass valve opened
7/19/2011	8:32:53 PM	Helium MFC set to  0.000000
7/19/2011	8:32:53 PM	H2 MFC set to  0.000000
7/19/2011	8:32:53 PM	BCl3 MFC set to  0.000000
7/19/2011	8:32:53 PM	PHl3 MFC set to  0.000000
7/19/2011	8:32:53 PM	SiCl4 MFC set to  0.000000
7/19/2011	8:32:53 PM	Bypass solenoid MFC set to  0.000000
7/19/2011	8:32:54 PM	Tube furnace set to 0
7/19/2011	8:33:59 PM	Helium valve closed
7/19/2011	8:33:59 PM	H2 valve closed
7/19/2011	8:33:59 PM	BCl3 valve closed
7/19/2011	8:33:59 PM	PH3 valve closed
7/19/2011	8:33:59 PM	SiCl4 pre valve closed
7/19/2011	8:33:59 PM	SiCl4 post valve closed
7/19/2011	8:33:59 PM	Main Vac valve closed
7/19/2011	8:33:59 PM	Bubbler valve closed
7/19/2011	8:33:59 PM	Bypass valve opened
7/19/2011	8:33:59 PM	Helium MFC set to  0.000000
7/19/2011	8:33:59 PM	H2 MFC set to  0.000000
7/19/2011	8:33:59 PM	BCl3 MFC set to  0.000000
7/19/2011	8:33:59 PM	PHl3 MFC set to  0.000000
7/19/2011	8:33:59 PM	SiCl4 MFC set to  0.000000
7/19/2011	8:33:59 PM	Bypass solenoid MFC set to  0.000000
7/19/2011	8:33:59 PM	Tube furnace set to 0
7/19/2011	8:34:59 PM	Helium valve closed
7/19/2011	8:34:59 PM	H2 valve closed
7/19/2011	8:34:59 PM	BCl3 valve closed
7/19/2011	8:34:59 PM	PH3 valve closed
7/19/2011	8:34:59 PM	SiCl4 pre valve closed
7/19/2011	8:34:59 PM	SiCl4 post valve closed
7/19/2011	8:34:59 PM	Bypass valve closed
7/19/2011	8:34:59 PM	Bubbler valve closed
7/19/2011	8:34:59 PM	Main Vac valve opened
7/19/2011	8:34:59 PM	Helium MFC set to  0.000000
7/19/2011	8:34:59 PM	H2 MFC set to  0.000000
7/19/2011	8:34:59 PM	BCl3 MFC set to  0.000000
7/19/2011	8:34:59 PM	PHl3 MFC set to  0.000000
7/19/2011	8:34:59 PM	SiCl4 MFC set to  0.000000
7/19/2011	8:34:59 PM	Bypass solenoid MFC set to  0.000000
7/19/2011	8:34:59 PM	Tube furnace set to 0
7/19/2011	8:35:00 PM	Run finished at 8:35 PM
7/19/2011	8:35:00 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/19/2011	9:11:53 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
7/19/2011	9:12:08 PM	Recipe started at 9:12 PM
7/19/2011	9:12:08 PM	Helium valve closed
7/19/2011	9:12:08 PM	H2 valve closed
7/19/2011	9:12:08 PM	BCl3 valve closed
7/19/2011	9:12:08 PM	PH3 valve closed
7/19/2011	9:12:08 PM	SiCl4 pre valve closed
7/19/2011	9:12:08 PM	SiCl4 post valve closed
7/19/2011	9:12:08 PM	Main Vac valve closed
7/19/2011	9:12:08 PM	Bubbler valve closed
7/19/2011	9:12:08 PM	Bypass valve opened
7/19/2011	9:12:08 PM	Helium MFC set to  0.000000
7/19/2011	9:12:08 PM	H2 MFC set to  0.000000
7/19/2011	9:12:08 PM	BCl3 MFC set to  0.000000
7/19/2011	9:12:08 PM	PHl3 MFC set to  0.000000
7/19/2011	9:12:08 PM	SiCl4 MFC set to  0.000000
7/19/2011	9:12:08 PM	Bypass solenoid MFC set to  0.000000
7/19/2011	9:12:08 PM	Tube furnace set to 0
7/19/2011	9:12:09 PM	Helium valve closed
7/19/2011	9:12:09 PM	H2 valve closed
7/19/2011	9:12:09 PM	BCl3 valve closed
7/19/2011	9:12:09 PM	PH3 valve closed
7/19/2011	9:12:09 PM	SiCl4 pre valve closed
7/19/2011	9:12:09 PM	SiCl4 post valve closed
7/19/2011	9:12:09 PM	Main Vac valve closed
7/19/2011	9:12:09 PM	Bubbler valve closed
7/19/2011	9:12:09 PM	Bypass valve opened
7/19/2011	9:12:09 PM	Helium MFC set to  0.000000
7/19/2011	9:12:09 PM	H2 MFC set to  0.000000
7/19/2011	9:12:09 PM	BCl3 MFC set to  0.000000
7/19/2011	9:12:09 PM	PHl3 MFC set to  0.000000
7/19/2011	9:12:09 PM	SiCl4 MFC set to  0.000000
7/19/2011	9:12:09 PM	Bypass solenoid MFC set to  0.000000
7/19/2011	9:12:09 PM	Tube furnace set to 0
7/19/2011	9:12:39 PM	Helium valve closed
7/19/2011	9:12:39 PM	H2 valve closed
7/19/2011	9:12:39 PM	BCl3 valve closed
7/19/2011	9:12:39 PM	PH3 valve closed
7/19/2011	9:12:39 PM	SiCl4 pre valve closed
7/19/2011	9:12:39 PM	SiCl4 post valve closed
7/19/2011	9:12:39 PM	Bypass valve closed
7/19/2011	9:12:39 PM	Bubbler valve closed
7/19/2011	9:12:39 PM	Main Vac valve opened
7/19/2011	9:12:39 PM	Helium MFC set to  0.000000
7/19/2011	9:12:39 PM	H2 MFC set to  0.000000
7/19/2011	9:12:39 PM	BCl3 MFC set to  0.000000
7/19/2011	9:12:39 PM	PHl3 MFC set to  0.000000
7/19/2011	9:12:39 PM	SiCl4 MFC set to  0.000000
7/19/2011	9:12:39 PM	Bypass solenoid MFC set to  0.000000
7/19/2011	9:12:39 PM	Tube furnace set to 0
7/19/2011	9:13:09 PM	H2 valve closed
7/19/2011	9:13:09 PM	BCl3 valve closed
7/19/2011	9:13:09 PM	PH3 valve closed
7/19/2011	9:13:09 PM	SiCl4 pre valve closed
7/19/2011	9:13:09 PM	SiCl4 post valve closed
7/19/2011	9:13:09 PM	Bypass valve closed
7/19/2011	9:13:09 PM	Bubbler valve closed
7/19/2011	9:13:09 PM	Helium valve opened
7/19/2011	9:13:09 PM	Main Vac valve opened
7/19/2011	9:13:09 PM	Helium MFC set to  20.000000
7/19/2011	9:13:09 PM	H2 MFC set to  0.000000
7/19/2011	9:13:09 PM	BCl3 MFC set to  0.000000
7/19/2011	9:13:09 PM	PHl3 MFC set to  0.000000
7/19/2011	9:13:09 PM	SiCl4 MFC set to  0.000000
7/19/2011	9:13:09 PM	Bypass solenoid MFC set to  0.000000
7/19/2011	9:13:09 PM	Tube furnace set to 0
7/19/2011	9:13:39 PM	Helium valve closed
7/19/2011	9:13:39 PM	H2 valve closed
7/19/2011	9:13:39 PM	BCl3 valve closed
7/19/2011	9:13:39 PM	PH3 valve closed
7/19/2011	9:13:39 PM	SiCl4 pre valve closed
7/19/2011	9:13:39 PM	SiCl4 post valve closed
7/19/2011	9:13:39 PM	Bypass valve closed
7/19/2011	9:13:39 PM	Bubbler valve closed
7/19/2011	9:13:39 PM	Main Vac valve opened
7/19/2011	9:13:39 PM	Helium MFC set to  0.000000
7/19/2011	9:13:39 PM	H2 MFC set to  0.000000
7/19/2011	9:13:39 PM	BCl3 MFC set to  0.000000
7/19/2011	9:13:39 PM	PHl3 MFC set to  0.000000
7/19/2011	9:13:39 PM	SiCl4 MFC set to  0.000000
7/19/2011	9:13:39 PM	Bypass solenoid MFC set to  0.000000
7/19/2011	9:13:39 PM	Tube furnace set to 0
7/19/2011	9:14:09 PM	H2 valve closed
7/19/2011	9:14:09 PM	BCl3 valve closed
7/19/2011	9:14:09 PM	PH3 valve closed
7/19/2011	9:14:09 PM	SiCl4 pre valve closed
7/19/2011	9:14:09 PM	SiCl4 post valve closed
7/19/2011	9:14:09 PM	Bypass valve closed
7/19/2011	9:14:09 PM	Bubbler valve closed
7/19/2011	9:14:09 PM	Helium valve opened
7/19/2011	9:14:09 PM	Main Vac valve opened
7/19/2011	9:14:09 PM	Helium MFC set to  20.000000
7/19/2011	9:14:09 PM	H2 MFC set to  0.000000
7/19/2011	9:14:09 PM	BCl3 MFC set to  0.000000
7/19/2011	9:14:09 PM	PHl3 MFC set to  0.000000
7/19/2011	9:14:09 PM	SiCl4 MFC set to  0.000000
7/19/2011	9:14:09 PM	Bypass solenoid MFC set to  0.000000
7/19/2011	9:14:10 PM	Tube furnace set to 0
7/19/2011	9:14:40 PM	Helium valve closed
7/19/2011	9:14:40 PM	H2 valve closed
7/19/2011	9:14:40 PM	BCl3 valve closed
7/19/2011	9:14:40 PM	PH3 valve closed
7/19/2011	9:14:40 PM	SiCl4 pre valve closed
7/19/2011	9:14:40 PM	SiCl4 post valve closed
7/19/2011	9:14:40 PM	Bypass valve closed
7/19/2011	9:14:40 PM	Bubbler valve closed
7/19/2011	9:14:40 PM	Main Vac valve opened
7/19/2011	9:14:40 PM	Helium MFC set to  0.000000
7/19/2011	9:14:40 PM	H2 MFC set to  0.000000
7/19/2011	9:14:40 PM	BCl3 MFC set to  0.000000
7/19/2011	9:14:40 PM	PHl3 MFC set to  0.000000
7/19/2011	9:14:40 PM	SiCl4 MFC set to  0.000000
7/19/2011	9:14:40 PM	Bypass solenoid MFC set to  0.000000
7/19/2011	9:14:40 PM	Tube furnace set to 0
7/19/2011	9:15:10 PM	H2 valve closed
7/19/2011	9:15:10 PM	BCl3 valve closed
7/19/2011	9:15:10 PM	PH3 valve closed
7/19/2011	9:15:10 PM	SiCl4 pre valve closed
7/19/2011	9:15:10 PM	SiCl4 post valve closed
7/19/2011	9:15:10 PM	Bypass valve closed
7/19/2011	9:15:10 PM	Bubbler valve closed
7/19/2011	9:15:10 PM	Helium valve opened
7/19/2011	9:15:10 PM	Main Vac valve opened
7/19/2011	9:15:10 PM	Helium MFC set to  20.000000
7/19/2011	9:15:10 PM	H2 MFC set to  0.000000
7/19/2011	9:15:10 PM	BCl3 MFC set to  0.000000
7/19/2011	9:15:10 PM	PHl3 MFC set to  0.000000
7/19/2011	9:15:10 PM	SiCl4 MFC set to  0.000000
7/19/2011	9:15:10 PM	Bypass solenoid MFC set to  0.000000
7/19/2011	9:15:10 PM	Tube furnace set to 0
7/19/2011	9:15:40 PM	Helium valve closed
7/19/2011	9:15:40 PM	H2 valve closed
7/19/2011	9:15:40 PM	BCl3 valve closed
7/19/2011	9:15:40 PM	PH3 valve closed
7/19/2011	9:15:40 PM	SiCl4 pre valve closed
7/19/2011	9:15:40 PM	SiCl4 post valve closed
7/19/2011	9:15:40 PM	Bypass valve closed
7/19/2011	9:15:40 PM	Bubbler valve closed
7/19/2011	9:15:40 PM	Main Vac valve opened
7/19/2011	9:15:40 PM	Helium MFC set to  0.000000
7/19/2011	9:15:40 PM	H2 MFC set to  0.000000
7/19/2011	9:15:40 PM	BCl3 MFC set to  0.000000
7/19/2011	9:15:40 PM	PHl3 MFC set to  0.000000
7/19/2011	9:15:40 PM	SiCl4 MFC set to  0.000000
7/19/2011	9:15:40 PM	Bypass solenoid MFC set to  0.000000
7/19/2011	9:15:40 PM	Tube furnace set to 0
7/19/2011	9:16:10 PM	H2 valve closed
7/19/2011	9:16:10 PM	BCl3 valve closed
7/19/2011	9:16:10 PM	PH3 valve closed
7/19/2011	9:16:10 PM	SiCl4 pre valve closed
7/19/2011	9:16:10 PM	SiCl4 post valve closed
7/19/2011	9:16:10 PM	Bypass valve closed
7/19/2011	9:16:10 PM	Bubbler valve closed
7/19/2011	9:16:10 PM	Helium valve opened
7/19/2011	9:16:10 PM	Main Vac valve opened
7/19/2011	9:16:10 PM	Helium MFC set to  20.000000
7/19/2011	9:16:10 PM	H2 MFC set to  0.000000
7/19/2011	9:16:10 PM	BCl3 MFC set to  0.000000
7/19/2011	9:16:10 PM	PHl3 MFC set to  0.000000
7/19/2011	9:16:10 PM	SiCl4 MFC set to  0.000000
7/19/2011	9:16:10 PM	Bypass solenoid MFC set to  0.000000
7/19/2011	9:16:10 PM	Tube furnace set to 0
7/19/2011	9:16:40 PM	Helium valve closed
7/19/2011	9:16:40 PM	H2 valve closed
7/19/2011	9:16:40 PM	BCl3 valve closed
7/19/2011	9:16:40 PM	PH3 valve closed
7/19/2011	9:16:40 PM	SiCl4 pre valve closed
7/19/2011	9:16:40 PM	SiCl4 post valve closed
7/19/2011	9:16:40 PM	Bypass valve closed
7/19/2011	9:16:40 PM	Bubbler valve closed
7/19/2011	9:16:40 PM	Main Vac valve opened
7/19/2011	9:16:40 PM	Helium MFC set to  0.000000
7/19/2011	9:16:40 PM	H2 MFC set to  0.000000
7/19/2011	9:16:40 PM	BCl3 MFC set to  0.000000
7/19/2011	9:16:40 PM	PHl3 MFC set to  0.000000
7/19/2011	9:16:40 PM	SiCl4 MFC set to  0.000000
7/19/2011	9:16:40 PM	Bypass solenoid MFC set to  0.000000
7/19/2011	9:16:41 PM	Tube furnace set to 0
7/19/2011	9:17:11 PM	H2 valve closed
7/19/2011	9:17:11 PM	BCl3 valve closed
7/19/2011	9:17:11 PM	PH3 valve closed
7/19/2011	9:17:11 PM	SiCl4 pre valve closed
7/19/2011	9:17:11 PM	SiCl4 post valve closed
7/19/2011	9:17:11 PM	Bypass valve closed
7/19/2011	9:17:11 PM	Bubbler valve closed
7/19/2011	9:17:11 PM	Helium valve opened
7/19/2011	9:17:11 PM	Main Vac valve opened
7/19/2011	9:17:11 PM	Helium MFC set to  20.000000
7/19/2011	9:17:11 PM	H2 MFC set to  0.000000
7/19/2011	9:17:11 PM	BCl3 MFC set to  0.000000
7/19/2011	9:17:11 PM	PHl3 MFC set to  0.000000
7/19/2011	9:17:11 PM	SiCl4 MFC set to  0.000000
7/19/2011	9:17:11 PM	Bypass solenoid MFC set to  0.000000
7/19/2011	9:17:11 PM	Tube furnace set to 0
7/19/2011	9:17:41 PM	Helium valve closed
7/19/2011	9:17:41 PM	H2 valve closed
7/19/2011	9:17:41 PM	BCl3 valve closed
7/19/2011	9:17:41 PM	PH3 valve closed
7/19/2011	9:17:41 PM	SiCl4 pre valve closed
7/19/2011	9:17:41 PM	SiCl4 post valve closed
7/19/2011	9:17:41 PM	Bypass valve closed
7/19/2011	9:17:41 PM	Bubbler valve closed
7/19/2011	9:17:41 PM	Main Vac valve opened
7/19/2011	9:17:41 PM	Helium MFC set to  0.000000
7/19/2011	9:17:41 PM	H2 MFC set to  0.000000
7/19/2011	9:17:41 PM	BCl3 MFC set to  0.000000
7/19/2011	9:17:41 PM	PHl3 MFC set to  0.000000
7/19/2011	9:17:41 PM	SiCl4 MFC set to  0.000000
7/19/2011	9:17:41 PM	Bypass solenoid MFC set to  0.000000
7/19/2011	9:17:41 PM	Tube furnace set to 0
7/19/2011	9:18:11 PM	H2 valve closed
7/19/2011	9:18:11 PM	BCl3 valve closed
7/19/2011	9:18:11 PM	PH3 valve closed
7/19/2011	9:18:11 PM	SiCl4 pre valve closed
7/19/2011	9:18:11 PM	SiCl4 post valve closed
7/19/2011	9:18:11 PM	Bypass valve closed
7/19/2011	9:18:11 PM	Bubbler valve closed
7/19/2011	9:18:11 PM	Helium valve opened
7/19/2011	9:18:11 PM	Main Vac valve opened
7/19/2011	9:18:11 PM	Helium MFC set to  20.000000
7/19/2011	9:18:11 PM	H2 MFC set to  0.000000
7/19/2011	9:18:11 PM	BCl3 MFC set to  0.000000
7/19/2011	9:18:11 PM	PHl3 MFC set to  0.000000
7/19/2011	9:18:11 PM	SiCl4 MFC set to  0.000000
7/19/2011	9:18:11 PM	Bypass solenoid MFC set to  0.000000
7/19/2011	9:18:11 PM	Tube furnace set to 0
7/19/2011	9:18:41 PM	Helium valve closed
7/19/2011	9:18:41 PM	H2 valve closed
7/19/2011	9:18:41 PM	BCl3 valve closed
7/19/2011	9:18:41 PM	PH3 valve closed
7/19/2011	9:18:41 PM	SiCl4 pre valve closed
7/19/2011	9:18:41 PM	SiCl4 post valve closed
7/19/2011	9:18:41 PM	Bypass valve closed
7/19/2011	9:18:41 PM	Bubbler valve closed
7/19/2011	9:18:41 PM	Main Vac valve opened
7/19/2011	9:18:41 PM	Helium MFC set to  0.000000
7/19/2011	9:18:41 PM	H2 MFC set to  0.000000
7/19/2011	9:18:41 PM	BCl3 MFC set to  0.000000
7/19/2011	9:18:41 PM	PHl3 MFC set to  0.000000
7/19/2011	9:18:41 PM	SiCl4 MFC set to  0.000000
7/19/2011	9:18:41 PM	Bypass solenoid MFC set to  0.000000
7/19/2011	9:18:41 PM	Tube furnace set to 0
7/19/2011	9:19:11 PM	H2 valve closed
7/19/2011	9:19:11 PM	BCl3 valve closed
7/19/2011	9:19:11 PM	PH3 valve closed
7/19/2011	9:19:11 PM	SiCl4 pre valve closed
7/19/2011	9:19:11 PM	SiCl4 post valve closed
7/19/2011	9:19:11 PM	Bypass valve closed
7/19/2011	9:19:11 PM	Bubbler valve closed
7/19/2011	9:19:11 PM	Helium valve opened
7/19/2011	9:19:11 PM	Main Vac valve opened
7/19/2011	9:19:11 PM	Helium MFC set to  20.000000
7/19/2011	9:19:11 PM	H2 MFC set to  0.000000
7/19/2011	9:19:11 PM	BCl3 MFC set to  0.000000
7/19/2011	9:19:11 PM	PHl3 MFC set to  0.000000
7/19/2011	9:19:11 PM	SiCl4 MFC set to  0.000000
7/19/2011	9:19:11 PM	Bypass solenoid MFC set to  0.000000
7/19/2011	9:19:11 PM	Tube furnace set to 0
7/19/2011	9:19:42 PM	Helium valve closed
7/19/2011	9:19:42 PM	H2 valve closed
7/19/2011	9:19:42 PM	BCl3 valve closed
7/19/2011	9:19:42 PM	PH3 valve closed
7/19/2011	9:19:42 PM	SiCl4 pre valve closed
7/19/2011	9:19:42 PM	SiCl4 post valve closed
7/19/2011	9:19:42 PM	Bypass valve closed
7/19/2011	9:19:42 PM	Bubbler valve closed
7/19/2011	9:19:42 PM	Main Vac valve opened
7/19/2011	9:19:42 PM	Helium MFC set to  0.000000
7/19/2011	9:19:42 PM	H2 MFC set to  0.000000
7/19/2011	9:19:42 PM	BCl3 MFC set to  0.000000
7/19/2011	9:19:42 PM	PHl3 MFC set to  0.000000
7/19/2011	9:19:42 PM	SiCl4 MFC set to  0.000000
7/19/2011	9:19:42 PM	Bypass solenoid MFC set to  0.000000
7/19/2011	9:19:42 PM	Tube furnace set to 0
7/19/2011	9:20:12 PM	H2 valve closed
7/19/2011	9:20:12 PM	BCl3 valve closed
7/19/2011	9:20:12 PM	PH3 valve closed
7/19/2011	9:20:12 PM	SiCl4 pre valve closed
7/19/2011	9:20:12 PM	SiCl4 post valve closed
7/19/2011	9:20:12 PM	Bypass valve closed
7/19/2011	9:20:12 PM	Bubbler valve closed
7/19/2011	9:20:12 PM	Helium valve opened
7/19/2011	9:20:12 PM	Main Vac valve opened
7/19/2011	9:20:12 PM	Helium MFC set to  20.000000
7/19/2011	9:20:12 PM	H2 MFC set to  0.000000
7/19/2011	9:20:12 PM	BCl3 MFC set to  0.000000
7/19/2011	9:20:12 PM	PHl3 MFC set to  0.000000
7/19/2011	9:20:12 PM	SiCl4 MFC set to  0.000000
7/19/2011	9:20:12 PM	Bypass solenoid MFC set to  0.000000
7/19/2011	9:20:12 PM	Tube furnace set to 0
7/19/2011	9:20:42 PM	Helium valve closed
7/19/2011	9:20:42 PM	H2 valve closed
7/19/2011	9:20:42 PM	BCl3 valve closed
7/19/2011	9:20:42 PM	PH3 valve closed
7/19/2011	9:20:42 PM	SiCl4 pre valve closed
7/19/2011	9:20:42 PM	SiCl4 post valve closed
7/19/2011	9:20:42 PM	Bypass valve closed
7/19/2011	9:20:42 PM	Bubbler valve closed
7/19/2011	9:20:42 PM	Main Vac valve opened
7/19/2011	9:20:42 PM	Helium MFC set to  0.000000
7/19/2011	9:20:42 PM	H2 MFC set to  0.000000
7/19/2011	9:20:42 PM	BCl3 MFC set to  0.000000
7/19/2011	9:20:42 PM	PHl3 MFC set to  0.000000
7/19/2011	9:20:42 PM	SiCl4 MFC set to  0.000000
7/19/2011	9:20:42 PM	Bypass solenoid MFC set to  0.000000
7/19/2011	9:20:42 PM	Tube furnace set to 0
7/19/2011	9:21:12 PM	H2 valve closed
7/19/2011	9:21:12 PM	BCl3 valve closed
7/19/2011	9:21:12 PM	PH3 valve closed
7/19/2011	9:21:12 PM	SiCl4 pre valve closed
7/19/2011	9:21:12 PM	SiCl4 post valve closed
7/19/2011	9:21:12 PM	Bypass valve closed
7/19/2011	9:21:12 PM	Bubbler valve closed
7/19/2011	9:21:12 PM	Helium valve opened
7/19/2011	9:21:12 PM	Main Vac valve opened
7/19/2011	9:21:12 PM	Helium MFC set to  20.000000
7/19/2011	9:21:12 PM	H2 MFC set to  0.000000
7/19/2011	9:21:12 PM	BCl3 MFC set to  0.000000
7/19/2011	9:21:12 PM	PHl3 MFC set to  0.000000
7/19/2011	9:21:12 PM	SiCl4 MFC set to  0.000000
7/19/2011	9:21:12 PM	Bypass solenoid MFC set to  0.000000
7/19/2011	9:21:12 PM	Tube furnace set to 0
7/19/2011	9:21:42 PM	Helium valve closed
7/19/2011	9:21:42 PM	H2 valve closed
7/19/2011	9:21:42 PM	BCl3 valve closed
7/19/2011	9:21:42 PM	PH3 valve closed
7/19/2011	9:21:42 PM	SiCl4 pre valve closed
7/19/2011	9:21:42 PM	SiCl4 post valve closed
7/19/2011	9:21:42 PM	Bypass valve closed
7/19/2011	9:21:42 PM	Bubbler valve closed
7/19/2011	9:21:42 PM	Main Vac valve opened
7/19/2011	9:21:42 PM	Helium MFC set to  0.000000
7/19/2011	9:21:42 PM	H2 MFC set to  0.000000
7/19/2011	9:21:42 PM	BCl3 MFC set to  0.000000
7/19/2011	9:21:42 PM	PHl3 MFC set to  0.000000
7/19/2011	9:21:42 PM	SiCl4 MFC set to  0.000000
7/19/2011	9:21:42 PM	Bypass solenoid MFC set to  0.000000
7/19/2011	9:21:43 PM	Tube furnace set to 0
7/19/2011	9:22:13 PM	H2 valve closed
7/19/2011	9:22:13 PM	BCl3 valve closed
7/19/2011	9:22:13 PM	PH3 valve closed
7/19/2011	9:22:13 PM	SiCl4 pre valve closed
7/19/2011	9:22:13 PM	SiCl4 post valve closed
7/19/2011	9:22:13 PM	Bypass valve closed
7/19/2011	9:22:13 PM	Bubbler valve closed
7/19/2011	9:22:13 PM	Helium valve opened
7/19/2011	9:22:13 PM	Main Vac valve opened
7/19/2011	9:22:13 PM	Helium MFC set to  20.000000
7/19/2011	9:22:13 PM	H2 MFC set to  0.000000
7/19/2011	9:22:13 PM	BCl3 MFC set to  0.000000
7/19/2011	9:22:13 PM	PHl3 MFC set to  0.000000
7/19/2011	9:22:13 PM	SiCl4 MFC set to  0.000000
7/19/2011	9:22:13 PM	Bypass solenoid MFC set to  0.000000
7/19/2011	9:22:13 PM	Tube furnace set to 0
7/19/2011	9:22:43 PM	Helium valve closed
7/19/2011	9:22:43 PM	H2 valve closed
7/19/2011	9:22:43 PM	BCl3 valve closed
7/19/2011	9:22:43 PM	PH3 valve closed
7/19/2011	9:22:43 PM	SiCl4 pre valve closed
7/19/2011	9:22:43 PM	SiCl4 post valve closed
7/19/2011	9:22:43 PM	Bypass valve closed
7/19/2011	9:22:43 PM	Bubbler valve closed
7/19/2011	9:22:43 PM	Main Vac valve opened
7/19/2011	9:22:43 PM	Helium MFC set to  0.000000
7/19/2011	9:22:43 PM	H2 MFC set to  0.000000
7/19/2011	9:22:43 PM	BCl3 MFC set to  0.000000
7/19/2011	9:22:43 PM	PHl3 MFC set to  0.000000
7/19/2011	9:22:43 PM	SiCl4 MFC set to  0.000000
7/19/2011	9:22:43 PM	Bypass solenoid MFC set to  0.000000
7/19/2011	9:22:43 PM	Tube furnace set to 0
7/19/2011	9:22:44 PM	Run finished at 9:22 PM
7/19/2011	9:22:44 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
7/19/2011	9:24:33 PM	Main Vac valve closed
7/19/2011	9:24:48 PM	Main Vac valve opened
7/19/2011	9:25:32 PM	Recipe started at 9:25 PM
7/19/2011	9:25:32 PM	Helium valve closed
7/19/2011	9:25:32 PM	H2 valve closed
7/19/2011	9:25:32 PM	BCl3 valve closed
7/19/2011	9:25:32 PM	PH3 valve closed
7/19/2011	9:25:32 PM	SiCl4 pre valve closed
7/19/2011	9:25:32 PM	SiCl4 post valve closed
7/19/2011	9:25:32 PM	Main Vac valve closed
7/19/2011	9:25:32 PM	Bypass valve closed
7/19/2011	9:25:32 PM	Bubbler valve closed
7/19/2011	9:25:32 PM	Helium MFC set to  0.000000
7/19/2011	9:25:32 PM	H2 MFC set to  0.000000
7/19/2011	9:25:32 PM	BCl3 MFC set to  0.000000
7/19/2011	9:25:32 PM	PHl3 MFC set to  0.000000
7/19/2011	9:25:32 PM	SiCl4 MFC set to  0.000000
7/19/2011	9:25:32 PM	Bypass solenoid MFC set to  0.000000
7/19/2011	9:25:32 PM	Tube furnace set to 0
7/19/2011	9:25:35 PM	Helium valve closed
7/19/2011	9:25:35 PM	BCl3 valve closed
7/19/2011	9:25:35 PM	PH3 valve closed
7/19/2011	9:25:35 PM	SiCl4 pre valve closed
7/19/2011	9:25:35 PM	SiCl4 post valve closed
7/19/2011	9:25:35 PM	Main Vac valve closed
7/19/2011	9:25:35 PM	Bypass valve closed
7/19/2011	9:25:35 PM	Bubbler valve closed
7/19/2011	9:25:35 PM	H2 valve opened
7/19/2011	9:25:35 PM	Helium MFC set to  0.000000
7/19/2011	9:25:35 PM	H2 MFC set to  500.000000
7/19/2011	9:25:35 PM	BCl3 MFC set to  0.000000
7/19/2011	9:25:35 PM	PHl3 MFC set to  0.000000
7/19/2011	9:25:35 PM	SiCl4 MFC set to  0.000000
7/19/2011	9:25:35 PM	Bypass solenoid MFC set to  0.000000
7/19/2011	9:25:35 PM	Tube furnace set to 0
7/19/2011	9:26:42 PM	Helium valve closed
7/19/2011	9:26:42 PM	BCl3 valve closed
7/19/2011	9:26:42 PM	PH3 valve closed
7/19/2011	9:26:42 PM	SiCl4 pre valve closed
7/19/2011	9:26:42 PM	SiCl4 post valve closed
7/19/2011	9:26:42 PM	Main Vac valve closed
7/19/2011	9:26:42 PM	Bypass valve closed
7/19/2011	9:26:42 PM	H2 valve opened
7/19/2011	9:26:42 PM	Bubbler valve opened
7/19/2011	9:26:42 PM	Helium MFC set to  0.000000
7/19/2011	9:26:42 PM	H2 MFC set to  500.000000
7/19/2011	9:26:42 PM	BCl3 MFC set to  0.000000
7/19/2011	9:26:42 PM	PHl3 MFC set to  0.000000
7/19/2011	9:26:42 PM	SiCl4 MFC set to  0.000000
7/19/2011	9:26:42 PM	Bypass solenoid MFC set to  0.000000
7/19/2011	9:26:42 PM	Tube furnace set to 0
7/19/2011	9:26:43 PM	Helium valve closed
7/19/2011	9:26:43 PM	BCl3 valve closed
7/19/2011	9:26:43 PM	PH3 valve closed
7/19/2011	9:26:43 PM	SiCl4 pre valve closed
7/19/2011	9:26:43 PM	SiCl4 post valve closed
7/19/2011	9:26:43 PM	Main Vac valve closed
7/19/2011	9:26:43 PM	Bypass valve closed
7/19/2011	9:26:43 PM	H2 valve opened
7/19/2011	9:26:43 PM	Bubbler valve opened
7/19/2011	9:26:43 PM	Helium MFC set to  0.000000
7/19/2011	9:26:43 PM	H2 MFC set to  500.000000
7/19/2011	9:26:43 PM	BCl3 MFC set to  0.000000
7/19/2011	9:26:43 PM	PHl3 MFC set to  0.000000
7/19/2011	9:26:43 PM	SiCl4 MFC set to  0.000000
7/19/2011	9:26:43 PM	Bypass solenoid MFC set to  0.000000
7/19/2011	9:26:43 PM	Tube furnace set to 1000
7/19/2011	9:46:43 PM	Helium valve closed
7/19/2011	9:46:43 PM	PH3 valve closed
7/19/2011	9:46:43 PM	Main Vac valve closed
7/19/2011	9:46:43 PM	Bypass valve closed
7/19/2011	9:46:43 PM	H2 valve opened
7/19/2011	9:46:43 PM	BCl3 valve opened
7/19/2011	9:46:43 PM	SiCl4 pre valve opened
7/19/2011	9:46:43 PM	SiCl4 post valve opened
7/19/2011	9:46:43 PM	Bubbler valve opened
7/19/2011	9:46:43 PM	Helium MFC set to  0.000000
7/19/2011	9:46:43 PM	H2 MFC set to  500.000000
7/19/2011	9:46:43 PM	BCl3 MFC set to  8.000000
7/19/2011	9:46:43 PM	PHl3 MFC set to  0.000000
7/19/2011	9:46:43 PM	SiCl4 MFC set to  50.000000
7/19/2011	9:46:43 PM	Bypass solenoid MFC set to  0.000000
7/19/2011	9:46:43 PM	Tube furnace set to 1000
7/19/2011	9:59:43 PM	Helium valve closed
7/19/2011	9:59:43 PM	BCl3 valve closed
7/19/2011	9:59:43 PM	PH3 valve closed
7/19/2011	9:59:43 PM	SiCl4 pre valve closed
7/19/2011	9:59:43 PM	SiCl4 post valve closed
7/19/2011	9:59:43 PM	Main Vac valve closed
7/19/2011	9:59:43 PM	Bypass valve closed
7/19/2011	9:59:43 PM	H2 valve opened
7/19/2011	9:59:43 PM	Bubbler valve opened
7/19/2011	9:59:43 PM	Helium MFC set to  0.000000
7/19/2011	9:59:43 PM	H2 MFC set to  500.000000
7/19/2011	9:59:43 PM	BCl3 MFC set to  0.000000
7/19/2011	9:59:43 PM	PHl3 MFC set to  0.000000
7/19/2011	9:59:43 PM	SiCl4 MFC set to  0.000000
7/19/2011	9:59:43 PM	Bypass solenoid MFC set to  0.000000
7/19/2011	9:59:43 PM	Tube furnace set to 750
7/19/2011	10:04:43 PM	H2 valve closed
7/19/2011	10:04:43 PM	BCl3 valve closed
7/19/2011	10:04:44 PM	PH3 valve closed
7/19/2011	10:04:44 PM	SiCl4 pre valve closed
7/19/2011	10:04:44 PM	SiCl4 post valve closed
7/19/2011	10:04:44 PM	Main Vac valve closed
7/19/2011	10:04:44 PM	Bypass valve closed
7/19/2011	10:04:44 PM	Helium valve opened
7/19/2011	10:04:44 PM	Bubbler valve opened
7/19/2011	10:04:44 PM	Helium MFC set to  500.000000
7/19/2011	10:04:44 PM	H2 MFC set to  0.000000
7/19/2011	10:04:44 PM	BCl3 MFC set to  0.000000
7/19/2011	10:04:44 PM	PHl3 MFC set to  0.000000
7/19/2011	10:04:44 PM	SiCl4 MFC set to  0.000000
7/19/2011	10:04:44 PM	Bypass solenoid MFC set to  0.000000
7/19/2011	10:04:44 PM	Tube furnace set to 0
7/19/2011	10:24:44 PM	Helium valve closed
7/19/2011	10:24:44 PM	H2 valve closed
7/19/2011	10:24:44 PM	BCl3 valve closed
7/19/2011	10:24:44 PM	PH3 valve closed
7/19/2011	10:24:44 PM	SiCl4 pre valve closed
7/19/2011	10:24:44 PM	SiCl4 post valve closed
7/19/2011	10:24:44 PM	Main Vac valve closed
7/19/2011	10:24:44 PM	Bypass valve closed
7/19/2011	10:24:44 PM	Bubbler valve closed
7/19/2011	10:24:44 PM	Helium MFC set to  0.000000
7/19/2011	10:24:44 PM	H2 MFC set to  0.000000
7/19/2011	10:24:44 PM	BCl3 MFC set to  0.000000
7/19/2011	10:24:44 PM	PHl3 MFC set to  0.000000
7/19/2011	10:24:44 PM	SiCl4 MFC set to  0.000000
7/19/2011	10:24:44 PM	Bypass solenoid MFC set to  0.000000
7/19/2011	10:24:44 PM	Tube furnace set to 0
7/19/2011	10:24:45 PM	Run finished at 10:24 PM
7/19/2011	10:56:57 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/19/2011	10:56:58 PM	Recipe started at 10:56 PM
7/19/2011	10:56:58 PM	Helium valve closed
7/19/2011	10:56:58 PM	H2 valve closed
7/19/2011	10:56:58 PM	BCl3 valve closed
7/19/2011	10:56:58 PM	PH3 valve closed
7/19/2011	10:56:58 PM	SiCl4 pre valve closed
7/19/2011	10:56:58 PM	SiCl4 post valve closed
7/19/2011	10:56:58 PM	Main Vac valve closed
7/19/2011	10:56:58 PM	Bypass valve closed
7/19/2011	10:56:58 PM	Bubbler valve closed
7/19/2011	10:56:58 PM	Helium MFC set to  0.000000
7/19/2011	10:56:58 PM	H2 MFC set to  0.000000
7/19/2011	10:56:58 PM	BCl3 MFC set to  0.000000
7/19/2011	10:56:58 PM	PHl3 MFC set to  0.000000
7/19/2011	10:56:58 PM	SiCl4 MFC set to  0.000000
7/19/2011	10:56:58 PM	Bypass solenoid MFC set to  0.000000
7/19/2011	10:56:58 PM	Tube furnace set to 0
7/19/2011	10:57:01 PM	H2 valve closed
7/19/2011	10:57:01 PM	BCl3 valve closed
7/19/2011	10:57:01 PM	PH3 valve closed
7/19/2011	10:57:01 PM	SiCl4 pre valve closed
7/19/2011	10:57:01 PM	SiCl4 post valve closed
7/19/2011	10:57:01 PM	Main Vac valve closed
7/19/2011	10:57:01 PM	Bypass valve closed
7/19/2011	10:57:01 PM	Bubbler valve closed
7/19/2011	10:57:01 PM	Helium valve opened
7/19/2011	10:57:01 PM	Helium MFC set to  500.000000
7/19/2011	10:57:01 PM	H2 MFC set to  0.000000
7/19/2011	10:57:01 PM	BCl3 MFC set to  0.000000
7/19/2011	10:57:01 PM	PHl3 MFC set to  0.000000
7/19/2011	10:57:01 PM	SiCl4 MFC set to  0.000000
7/19/2011	10:57:01 PM	Bypass solenoid MFC set to  0.000000
7/19/2011	10:57:02 PM	Tube furnace set to 0
7/19/2011	10:57:07 PM	Helium valve closed
7/19/2011	10:57:07 PM	H2 valve closed
7/19/2011	10:57:07 PM	BCl3 valve closed
7/19/2011	10:57:07 PM	PH3 valve closed
7/19/2011	10:57:07 PM	SiCl4 pre valve closed
7/19/2011	10:57:07 PM	SiCl4 post valve closed
7/19/2011	10:57:07 PM	Main Vac valve closed
7/19/2011	10:57:07 PM	Bypass valve closed
7/19/2011	10:57:07 PM	Bubbler valve closed
7/19/2011	10:57:07 PM	Helium MFC set to  0.000000
7/19/2011	10:57:07 PM	H2 MFC set to  0.000000
7/19/2011	10:57:07 PM	BCl3 MFC set to  0.000000
7/19/2011	10:57:07 PM	PHl3 MFC set to  0.000000
7/19/2011	10:57:07 PM	SiCl4 MFC set to  0.000000
7/19/2011	10:57:07 PM	Bypass solenoid MFC set to  0.000000
7/19/2011	10:57:07 PM	Tube furnace set to 0
7/19/2011	10:57:08 PM	Run finished at 10:57 PM
7/19/2011	10:57:08 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/19/2011	11:03:28 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/19/2011	11:03:29 PM	Recipe started at 11:03 PM
7/19/2011	11:03:29 PM	Helium valve closed
7/19/2011	11:03:29 PM	H2 valve closed
7/19/2011	11:03:29 PM	BCl3 valve closed
7/19/2011	11:03:29 PM	PH3 valve closed
7/19/2011	11:03:29 PM	SiCl4 pre valve closed
7/19/2011	11:03:29 PM	SiCl4 post valve closed
7/19/2011	11:03:29 PM	Main Vac valve closed
7/19/2011	11:03:29 PM	Bubbler valve closed
7/19/2011	11:03:29 PM	Bypass valve opened
7/19/2011	11:03:29 PM	Helium MFC set to  0.000000
7/19/2011	11:03:29 PM	H2 MFC set to  0.000000
7/19/2011	11:03:29 PM	BCl3 MFC set to  0.000000
7/19/2011	11:03:29 PM	PHl3 MFC set to  0.000000
7/19/2011	11:03:29 PM	SiCl4 MFC set to  0.000000
7/19/2011	11:03:29 PM	Bypass solenoid MFC set to  0.000000
7/19/2011	11:03:29 PM	Tube furnace set to 0
7/19/2011	11:04:31 PM	Helium valve closed
7/19/2011	11:04:31 PM	H2 valve closed
7/19/2011	11:04:31 PM	BCl3 valve closed
7/19/2011	11:04:31 PM	PH3 valve closed
7/19/2011	11:04:31 PM	SiCl4 pre valve closed
7/19/2011	11:04:31 PM	SiCl4 post valve closed
7/19/2011	11:04:31 PM	Main Vac valve closed
7/19/2011	11:04:31 PM	Bubbler valve closed
7/19/2011	11:04:31 PM	Bypass valve opened
7/19/2011	11:04:31 PM	Helium MFC set to  0.000000
7/19/2011	11:04:31 PM	H2 MFC set to  0.000000
7/19/2011	11:04:31 PM	BCl3 MFC set to  0.000000
7/19/2011	11:04:31 PM	PHl3 MFC set to  0.000000
7/19/2011	11:04:31 PM	SiCl4 MFC set to  0.000000
7/19/2011	11:04:31 PM	Bypass solenoid MFC set to  0.000000
7/19/2011	11:04:32 PM	Tube furnace set to 0
7/19/2011	11:05:32 PM	Helium valve closed
7/19/2011	11:05:32 PM	H2 valve closed
7/19/2011	11:05:32 PM	BCl3 valve closed
7/19/2011	11:05:32 PM	PH3 valve closed
7/19/2011	11:05:32 PM	SiCl4 pre valve closed
7/19/2011	11:05:32 PM	SiCl4 post valve closed
7/19/2011	11:05:32 PM	Bypass valve closed
7/19/2011	11:05:32 PM	Bubbler valve closed
7/19/2011	11:05:32 PM	Main Vac valve opened
7/19/2011	11:05:32 PM	Helium MFC set to  0.000000
7/19/2011	11:05:32 PM	H2 MFC set to  0.000000
7/19/2011	11:05:32 PM	BCl3 MFC set to  0.000000
7/19/2011	11:05:32 PM	PHl3 MFC set to  0.000000
7/19/2011	11:05:32 PM	SiCl4 MFC set to  0.000000
7/19/2011	11:05:32 PM	Bypass solenoid MFC set to  0.000000
7/19/2011	11:05:32 PM	Tube furnace set to 0
7/19/2011	11:05:33 PM	Run finished at 11:05 PM
7/19/2011	11:05:33 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
